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Vacuum / Cleanroom Stages

LTP30(782501:019.26)

[Translate to Englisch:] LTP30 Reinraum- und Vakuum-Lineartisch für Hochvakuum, Optik, Photonik, Laser und Active Alignment

Flat Vacuum Linear Stage HV 10E-8 mbar, UV, DUV, ISO 6 | Travel 50 - 150 mm | Rep ± 2.3 µm | Load 4.5 kg | Speed 40 mm/s Vacuum: all HV ranges, liquid lubrication up to 10-8 mbar Cleanroom: variants up to class ISO 6 (higher on request) Max. bakeout temperature: 100°C Optionally configurable: Travel variants from 50 mm to 150 mm Suitable for UV and DUV applications Magnetic version Custom adaptations possible for specific installation situations and system requirements Narrow Linear Stage With a width of only 30 mm, the LTP30 Linear Stage is an extremely narrow series and is therefore used in applications with limited installation space. The linear stage features a robust drive and guide design and enables travels of up to 150 mm. Applications Optics and photonics systems, sensor and optics positioning, inspection and measurement systems, laboratory automation, medical devices, precise handling and positioning systems, vacuum-compatible equipment, cleanroom processes, machines for highly precise integration tasks, as well as research and development

Standard Axes & Stages

KT510-SM

KT510-SM High precise even under variable load conditions This XY positioning system was developed especially for measurement applications where <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=112&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=280fe146383dbb63d12865624b93a818 title="Rotation around the Y axis">pitch and <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=114&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=e44744e6f2dca9116c6937a3b1722cc6 title="Rotation around the Z axis">yaw errors are disturbing. Even the smallest <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=112&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=280fe146383dbb63d12865624b93a818 title="Rotation around the Y axis">pitch and <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=114&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=e44744e6f2dca9116c6937a3b1722cc6 title="Rotation around the Z axis">yaw errors can be minimized to 25 µrad over the entire travels of 200 mm. With short measuring paths of 10 mm, these can even be reduced by a factor of 5. Even with variable loads up to 30 kg, the cross table allows high-precision measurements by the robust plate design. The XY stage is driven by a motor-spindle combination consisting of a 2-phase stepper motor and a Steinmeyer ball screw with 1 mm pitch. Ideal for demanding measurement applications High-precision positioning of variable loads up to 30 kg Drastic reduction of measurement errors to 25 µrad (200 mm travel), with shorter travel distances up to 5 µrad (10 mm) Perfect straightness and flatness with ± 1 Fields of application metrology, surface inspection, inspection systems, tool measurement

KT310-DC

KT310-DC XY stage for universal applications With a travel of 200 mm in the X and Y directions, the XY stage can be used for all applications, especially for tasks in testing and measurement engineering. Its concept with internal motors, cross roller bearings and high precision ball screws enables excellent precision with optimum use of the installation place. Specially for measuring applications Ideal for inspection systems, metrology and microscopye High-precision repeatability up to 0.7 µm Optional with stepper motor, DC motor and in different measuring system resolutions Fields of application Metrology, high-resolution microscopy, biotechnology, medical industry, test engineering, inspection systems

KT180-SM

KT180-SM Ultra flat XY stage The KT180 is a universally usable XY stage that is characterized by extremely flat design. Because of the corss roller bearings used, it achieves outstanding operational parameters which are critical for applications in measurement engineering. The XY stage design forms the basis of the internal motors concept. Specially for measuring applications Ideal for inspection systems, microscopy and measuring systems High-precision repeatability up to 1.2 µm Optional with DC motor or stepper motor Fields of application Applications in microscopy, metrology, inspection systems, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measurement devices.

KT180-DC

KT180-DC Ultra flat XY stage The KT180 is a universally usable XY stage that is characterized by extremely flat design. Because of the corss roller bearings used, it achieves outstanding operational parameters which are critical for applications in measurement engineering. The XY stage design forms the basis of the internal motors concept. Specially for measuring applications Ideal for inspection systems, microscopy and measuring systems High-precision repeatability up to 0.5 µm Optional with DC motor or stepper motor Fields of application Applications in microscopy, metrology, inspection systems, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measurement devices.

KDT180-DC

KDT180-DC Symmetrical XY stage in plate architecture with aperture The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications. Compact and flat with large aperture Ideal for microscopy, inspection and measuring systems Precise repeatability up to 1.1 µm Optional as DC motor or stepper motor version Fields of application Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment

KDT180-NM

KDT180-NM High precision XY stage with aperture Equipped with piezo motors, the KDT180 is impressive with the smallest increments and high resolution. The XY stage achieves high speed at the same time as high positioning resolution. This XY system is also available as a high vacuum, ultra-high vacuum and non-magnetic version for demanding ambient conditions. Suitable for demanding environments Ideal for microscopy, research and development and experimental physics High-precision repeatability up to 0.5 µm High speeds with very high positioning resolution Optional with piezo motor, stepper motor or DC motor Vacuum version (HV / UHV) and non-magnetic variants available Fields of application High resolution applications in microscopy, super resolution microscopy, scanning microscopy, 3D imaging, screening, vacuum chambers, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing, research, experimental physics, electronics assembly, optics positioning, sample positioning References Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 |

KDT380-DC

KDT380-DC Precision aperture stage for heavy loads The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time. Highly compact for a wide range of inspection tasks Ideal for high-precision inspection, microscopy or scanning applications Large Aperture of 170 x 170 mm Very rigid positioning of high loads up to 20 kg Options: Available with DC motor or stepper motor Different high resolution measuring systems Version for clean room and vacuum on request Fields of application metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement

KDT310-DC

KDT310-DC Scanning stage with large aperture The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime. Designed for microscopy tasks Ideal for microscopy, optical inspection systems and laser processing High-precision repeatability up to 0.5 µm Good price-performance ratio and very long life cycle Optional as stepper motor version or with 50 mm travel (KDT235) available Fields of application High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

KDT235-DC

KDT235-DC Scanning stage with large aperture The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. Designed for microscopy tasks Ideal for microscopy, optical inspection systems and laser processing High-precision repeatability up to 0.5 µm Good price-performance ratio and very long life cycle Options: Available with DC motor or stepper motor Travel range up to 100 mm (KDT310) Different high resolution measuring systems Version for clean room and vacuum on request Fields of application High-<link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=118&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=63e7db6214b28acbc8b38f32b43ce162 title="smallest change in distance that a system can distinguish">resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurements, transmitted light measurements, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

KT405-EDLM

KT405-EDLM Scanning stage for highly dynamic applications This compact XY stage was specially designed as a fast scanning stage for various measurement applications. It combines high stiffness with excellent performance, while the integrated linear motors ensure high dynamics. This KT series is available in three sizes, each with different travels: up to 110 mm (KT230), 210 mm (KT305) and 320 mm (KT405) in X and Y direction. Extremely fast with high resolution and accuracy Ideal for scanning applications in metrology and microscopy High-precision repeatability up to 0.3 µm High speeds up to 100 mm/s PositionSave function secures the exact position of the stages, when the motors are „off“ Fields of application Metrology, high-resolution microscopy, screening, confocal microscopy, biotechnology, 3-D imaging, interferometry

KT305-EDLM

KT305-EDLM Scanning stage for highly dynamic applications This compact XY stage was specially designed as a fast scanning stage for various measurement applications. It combines high stiffness with excellent performance, while the integrated linear motors ensure high dynamics. This KT series is available in three sizes, each with different travels: up to 110 mm (KT230), 210 mm (KT305) and 320 mm (KT405) in X and Y direction. Extremely fast with high resolution and accuracy Ideal for scanning applications in metrology and microscopy High-precision repeatability up to 0.3 µm High speeds up to 150 mm/s PositionSave function secures the exact position of the stages, when the motors are „off“ Fields of application Metrology, high-resolution microscopy, screening, confocal microscopy, biotechnology, 3-D imaging, interferometry

KT230-EDLM

KT230-EDLM Scanning stage for highly dynamic applications This compact XY stage was specially designed as a fast scanning stage for various measurement applications. It combines high stiffness with excellent performance, while the integrated linear motors ensure high dynamics. This KT series is available in three sizes, each with different travels: up to 110 mm (KT230), 210 mm (KT305) and 320 mm (KT405) in X and Y direction. Fast with high resolution and accuracy Ideal for scanning applications in metrology and microscopy High-precision repeatability up to 0.3 µm High speeds up to 300 mm/s Position save function secures the exact position of the stages, when the motors are „off“ Fields of application Metrology, high-resolution microscopy, screening, confocal microscopy, biotechnology, 3-D imaging, interferometry

KDT600-EDLM

KDT600-EDLM Scanning stage with large aperture This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems. Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. With the large transmitted light, large substrates can also be measured from both sides or with fluoroscopy. It also offers the option of differential measurement to take advantage of full sensor accuracy in measurement applications. Even when the stage is fully moved, an opening of at least 60mm x 60mm is always kept. Fastest scanning applications with high acceleration Extremely fast scan results by a positioning speed of 330 mm/s Scan high loads with an extreme resolution of 0.05 µm Cost-optimized to achieve the comparable performance of air bearing systems Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary Life expectancy up to two million full strokes integrated cable management, plug-in terminal Fields of application Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems

KT500-EDLM

KT500-EDLM Flat, precise and fast The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible. Highly dynamic XY system with long lifetime High-precision repeatability up to 0.3 µm Time savings in start-stop operation by top speeds of up to 400 mm/s and an acceleration of 1G Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary Life expectancy up to two million full strokes Available with up to two electrodynamic linear motors per direction: 2+2 motors for particularly fast scan results, 2+1 motors for equal dynamics Fields of application Fast scanning applications and dynamic trajectory e.g. semiconductor inspection, metrology equipment, automatic optical inspection (AOI), measuring equipment, differential measurement, replacement for air bearing stages

KT470-DC

KT470-DC High loads with long travels The KT470 XY stage with DC-Motor is used in surface inspection. Low run-off with regard to straightness and flatness can be achieved by using cross rollers. This leads to an above-average repeatability, which is the basis for good compensation. This enables an extremely high accuracy for measuring applications. Positioning of loads up to 230 N with an economical drive High speeds up to 100 mm/s Very high reliability with minimal frictional resistance by using of lapped cross roller bearings Options: Available with DC or stepper motor High-resolution measuring system Configuration for cleanroom, laboratory or production Customized development with 3D design, prototypes, series production Cost-optimized and reliable positioning Depending on customer requirements, the XY system is equipped with a stepper motor or DC motor. The DC motor is the first choice for applications with high speeds and low torques. If, on the other hand, the positioning task requires low power and low speeds, the stepper motor is the appropriate variant. Fields of application Fast scanning applications and dynamic web travel e.g. semiconductor inspection, wafer inspection, chip testing, metrology systems, automatic optical inspection (AOI), measuring instruments, metrology, inspection systems, tool measurement

KT470-SM

KT470-SM High loads with long travels The KT470 XY stage with stepper motor is used in surface inspection. Low run-off with regard to straightness and flatness can be achieved by using cross rollers. This leads to an above-average repeatability, which is the basis for good compensation. This enables an extremely high accuracy for measuring applications. Positioning of loads up to 230 N with an economical drive Reduction of random errors to a minimum very high reliability with minimal frictional resistance by using of lapped cross roller bearings Options: Available with DC or stepper motor High-resolution measuring system Configuration for cleanroom, laboratory or production Customized development with 3D design, prototypes, series production Cost-optimized and reliable positioning Depending on customer requirements, the XY system is equipped with a stepper motor or DC motor. The DC motor is the first choice for applications with high speeds and low torques. If, on the other hand, the positioning task requires low power and low speeds, the stepper motor is the appropriate variant. The recommended load in the precision cycle is 10 kg, the maximum load is 30 kg. Fields of application Fast scanning applications and dynamic web travel e.g. semiconductor inspection, wafer inspection, chip testing, metrology systems, automatic optical inspection (AOI), measuring instruments, metrology, inspection systems, tool measurement

KDT180-SM

KDT180-SM Symmetrical XY stage in plate architecture with aperture The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications. Compact and flat with large aperture Ideal for microscopy, inspection and measuring systems Precise repeatability up to 2.3 µm Optional as DC motor or stepper motor version Fields of application Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment

KDT180-PM

KDT180-PM High precision XY stage with aperture Equipped with piezo motors, the KDT180 is impressive with the smallest increments and high resolution. The XY stage achieves high speed at the same time as high positioning resolution. This XY system is also available as a high vacuum, ultra-high vacuum and non-magnetic version for demanding ambient conditions. Suitable for demanding environments Ideal for microscopy, research and development and experimental physics High-precision repeatability up to 0.3 µm Optional with nanomotion, stepper motor or DC motor Vacuum version (HV / UHV) and non-magnetic variants available Fields of application High resolution microscopy, scanning microscopy, 3D imaging, screening, vacuum chambers, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing, research, experimental physics, electronics assembly, optics positioning, sample positioning

KT600-EDLM

KT600-EDLM Precision giant with the highest repeatability This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes. Fastest scanning applications with high acceleration Ideal for scanning applications or high-precision positioning Extremely fast scan results by a positioning speed of 330 mm/s Scan high loads with an extreme resolution of 0.05 µm Cost-optimized to achieve the comparable performance of air bearing systems Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary Life expectancy up to two million full strokes integrated cable management, plug-in terminal Fields of application Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems

KDT310-SM

KDT310-SM Scanning stage with large aperture The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime. Designed for microscopy tasks Ideal for microscopy, optical inspection systems and laser processing High-precision repeatability up to 1.6 µm Good price-performance ratio and very long life cycle Optional as DC-Motor version or with 50 mm travel (KDT235) available Fields of application High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

KLT310-DC

KLT310-DC High precision XY stage with high load rating The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads. The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering. Ideal for demanding measurement applications High-precision positioning of loads up to 280 N Accuracy values up to 0.5 µm due to high-precision spindle axes Optional with stepper motor, DC motor and in different measuring system resolutions Vacuum version available Fields of application Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

KLT310-SM

KLT310-SM High precision XY stage with high load rating The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads. The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering. Ideal for demanding measurement applications High-precision positioning of loads up to 280 N Accuracy values up to 1.6 µm due to high-precision spindle axes Optional with stepper motor, DC motor and in different measuring system resolutions Vacuum version available Fields of application Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

KT310-SM

KT310-SM XY stage for universal applications With a travel of 200 mm in the X and Y directions, the XY stage can be used for all applications, especially for tasks in testing and measurement engineering. Its concept with internal motors, cross roller bearings and high precision ball screws enables excellent precision with optimum use of the installation place. Specially for measuring applications Ideal for inspection systems, metrology and microscopye High-precision repeatability up to 2.3 µm Optional with stepper motor, DC motor and in different measuring system resolutions Fields of application Metrology, high-resolution microscopy, biotechnology, medical industry, test engineering, inspection systems

KDT235-SM

KDT235-SM Scanning stage with large aperture The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. Designed for microscopy tasks Ideal for microscopy, optical inspection systems and laser processing High-precision repeatability up to 1.6 µm Good price-performance ratio and very long life cycle Options: Available with DC motor or stepper motor Travel range up to 100 mm (KDT310) Different high resolution measuring systems Version for clean room and vacuum on request Fields of application High resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurements, transmitted light measurements, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

KLT810-DLM

KLT810-DLM Highly Dynamic XY System The multi-axis system KLT810 is characterized by its excellent process and accuracy values and achieves very high speed and acceleration through the built-in linear motors. It is therefore easy to accelerate heavy loads with high precision on a travel distance of 400 x 400 mm. Based on Preciscion Linear Stages of the PLT Series This multi-axis system was specially developed for laser material processing. For this purpose, two linear stages of the PLT240 series were combined, which achieve the precision required in laser technology and have a long lifetime. Suitable for Industrial Applications The KLT810 has a sturdy and dustproof housing, making it ideal for use in industrial environments. Optionally, this high-precision multi-axis system can also be prepared with sealing air.

2PLT240-DLM

2PLT240-DLM High-dynamic XY linear stage combination The XY positioning system of the PLT240 series combines two high-performance linear stages into a highly dynamic and precise XY motion platform. The iron-core linear motors enable high accelerations and velocities, while the integrated linear scale ensures excellent repeatability and positioning accuracy. The robust profile rail guides provide stable and reliable operation even in demanding industrial environments. Travel: 600 × 300 mm or 750 × 400 mm High dynamics up to 1185 mm/s with up to 0.4 µm accuracy Max. acceleration: 14–16 m/s² for fast motion cycles High stability thanks to profile rail guides on both axes Options: Base plate made of granite or aluminium Enclosure for industrial environments Cleanroom versions up to ISO class 6 (higher on request) Beam variants: UV (DUV, EUV, X-ray and gamma on request) Customization for customer-specific applications Fields of application High-performance positioning tasks, laser material processing, optics and metrology, 2D scanning processes, industrial automation, precision assembly, laboratory analytics, semiconductor manufacturing, research & development.

2PLT165-DLM

2PLT165-DLM High Performance XY Stage The drive concept of this linear stage combination from the PLT165 series is based on a linear motor and enables high accelerations and speeds. The precision XY Stage is ideal for highly dynamic applications with high loads. Made for industrial applications The PLT160 series axes can be combined flexibly with travel ranges from 200 - 750 mm with different motor variants for light up to heavy-duty applications. The protected housing and metal strip cover ensure dust and particle protection in industrial environments. Various fields of application Reliable 24/7 positioning under constant parameters, precise feeding of samples, sensors or optics, laser processing, semiconductor technology or metrology

LTP90-SM

LTP90-SM Price-optimized linear stage Excellent operating parameters and high stiffness along with an optimum price-performance ratio are what distinguishes this linear stage. The LTP90 is extremely compact with an integrated motor and even an integrated controller. Horizontal and vertical applications The LTP90 is very flexible since it can be used in either horizontal or vertical applications. In combination with the KT210 this stage provides a simple way to solve complete applications. Integrated controller Thanks to the integrated controller, the LTP90 is ready for use in only a few simple steps. The stage has an USB interface for a connection that is as universal as possible. It can therefore be used in a very wide range of applications – in measurement engineering, the automation industry or in microscopy.

PLT165-SM

PLT165-SM Precision stage with stepper motor The PLT165-SM features an easy-to-operate stepper motor in combination with a high precision ball screw. The slim design of the linear stage, with a width of just 165 mm, allows it to be used in restricted spaces. Ideal for vertical applications Thanks to its protective casing, it can be used in industrial environments. A ball screw drive in combination with an electromagnetic brake offers maximum self-retention force, allowing a vertical position to be maintained even when the device is de-energized. The PLT165 can be easily combined with the lifting stage HT160. Universal application The PLT165-SM is suitable for positioning sensors or lenses in applications that place strict demands on lifetime and reliability, such as laser engineering and metrology.

LTP80-SM

LTP80-SM Optimum price-performance ratio The LTP80 linear stage is designed for simple positioning tasks and has an optimum price-performance-ratio. The travel of the LTP80 series varies from 150 mm to 550 mm and can be selected according to the application. Linear stage with flexible motorization The linear stage is equipped with a stepper motor. It is also available with a DC motor. Two LTP80 stages can be easily combined to form a simple XY system. The linear stage is also available in a vacuum version. Numerous possibilities for use The LTP80 is suitable for all aereas of industry where the precise adjustment of probes, sensors or optics is requirred - such as for applications in the automation industry or in the laboratory.

PMT160-EDLM

PMT160-EDLM Precision measurement stage with high resolution Because of its drive concept in combination with a high-resolution linear measuring system, the PMT160-EDLM provides increments in the submicro range together with high positioning speeds. Compact and suitable for industrial applications Thanks to its closed design with integrated cable routing, the PMT160-EDLM is the ideal precision measurement stage for industrial applications. In combination with a controller with error compensation, it achieves excellent accuracies. Long lifetime despite continuous dynamic load With its wear-free drive concept, the PMT160-EDLM guarantees an excellent lifetime even with high acceleration - for example, in laser technology or the semiconductor industry.

PMT160-NM

PMT160-NM Precision measurement stage The linear stages of the PMT series are optimized especially for use in the metrology world. Outstanding low deviations from straightness and flatness as well as high system accuracies characterize these stages. A comprehensive package In the design of the PMT series we paid particular attention to flexibility. Depending on the application we are able to adapt the encoder to the required repeatability. . Optimized motion control For an optimum motion system solution, controllers are offered to meet the sophisticated application criteria. The FMC series controllers are available as table-top, DIN-rail mount or 19" rack versions for industrial applications.

PMT160-SM

PMT160-SM Precision measurement stage with stepper motor The high precision PMT linear stage have been specially developed for requirements in measurement engineering. With high quality cross roller bearings, they achieve unique operational parameters that are currently of major importance in measurement engineering. The PMT160 is also available with DC motor. Very high positioning resolutions A special feature of the PMT160 driven by a stepper motor is that, without additional measuring systems, it provides a cost-effective possibility to achieve very high positioning resolutions in micro-step operation. It can be quickly combined to create a two axis system without the need for adapters. It is easily controlled by means of our innovative FMC series motion controllers. Use in measurement engineering The PMT160-SM is particularly at home in measurement engineering and micromachining applications. It is also ideal for applications in optics or for sensor positioning.

PMT160-DC

PMT160-DC High precision measurement stage The PMT160 with DC motor is a precision measurement stage that has outstanding operational parameters. A preloaded ball screw ensures high stiffness and minimum backlash. The PMT160 is also available with a stepper motor. Quick and easy to combine The PMT160 with DC motor, in combination with a linear distance measuring system, achieves very small adjustment increments at high positioning speeds. It is easily combined to create a two axis system or, when equipped with an electromagnetic brake, is ideal for use as a vertical axis. For high dynamic applications The high precision linear stage is suitable for all applications that require excellent flatness, very small tolerances for pitch and yaw as well as smooth movement. The PMT160-DC is therefore primarily used in measurement engineering, micromachining or optics.

LTP30-DC

LTP30-DC Narrow linear stage The LTP30 linear stage is an extremely narrow model with a width of just 30 mm and is therefore used for applications with a limited application space. The linear stage has a robust drive and guide design and enables travel distances of up to 150 mm. Easy to control The LTP30 linear stage is available in a stepper motor version or with a DC motor and can be easily controlled using our FMC series motion controllers. The linear stage is also available in a vacuum and non magnetic version. Therefore the LTP30 is perfect for applications in challenging environments. Various fields of use The fields of use for this linear stage are versatile and found throughout industry where the precise adjustment of probes, sensors or optics is required – such as in the automation industry or in the laboratory area.

LTP60-DC

LTP60-DC Compact universal stage The priceoptimized LTP60 linear stage has been specially developed for use in the automation industry. It is available with various travel lengths from 50 mm up to 250 mm and can easily be combined with another LTP60 linear stage or the wider LTP80 version to form an XY system. Flexible drive concepts The linear stage is available with a stepper motor or DC motor. As an option, we also offer the LTP60 with an integrated controller. The linear stage is also available in a vacuum version and suits to applications in challenging environments. Universal application The LTP60 linear stage is suitable as an infeed stage for simple positioning tasks and is used in all areas of industry – such as for applications in the laboratory or in research and development.

PLT320-SM

PLT320-SM Precision in micro-stepping operation With a width of 320 mm the PLT320-SM is the largest model in the PLT series. The PLT320-SM is equipped with a stepper motor for highly precise operation in the micrometer range. Versatile combination options It can be combined with other linear stages to form complex multi-axis systems. Its robust electromagnetic brake ensures that the PLT320-SM can operate in either horizontal or vertical orientation. Universal application The PLT320 can be used across a range of applications in industrial environments including laser engineering, semiconductor technology and special-purpose machinery manufacture. In addition, the linear stage offers maximum reliability and long lifetime.

PLT240-SM

PLT240-SM Linear stage for high loads The PLT240-SM provides micro-stepping operation for high repeatability. When operated in combination with an electromagnetic brake, the ball screw drive also allows vertical orientation. Basis for multi axis combinations The PLT240-SM is suitable as a basis for axis combinations with additional linear stages in the PLT series or with rotary stages such as the DT240. Demanding environments The conditions common to laser engineering and special-purpose machinery manufacture place strict demands on the design of linear stages. The PLT series has been designed especially for use in these industrial environments, and combines a long lifetime with maximum reliability.

PLT320-AC

PLT320-AC For large travel The PLT320-AC is the model of choice for high load applications with travel of up to 1000 mm. The linear stage provides accurate positioning of high loads, while at the same time offering a robust design. Perfect basis for multis-axis applications The PLT320-AC can be combined with other stages in the series with ease, which makes it the perfect basis for multi-axis systems. Heavy-load system can also be accomplished. For use in industrial environments The durable continuous profile and innovative steel strip cover make it ideal for use in industrial environments. It can be easily combined with state-of-the-art industrial control systems for a range of applications, including laser engineering, metrology and special-purpose machinery.

PLT320-DLM

PLT320-DLM Precision in heavy-duty operation The PLT320-DLM is the model of choice for positioning heavy loads with speed and precision. The integrated linear motor, in combination with a linear measuring system, can accelerate heavy loads with extreme precision. Basis for multi-axis systems With a width of 320 mm, this linear stage is the largest model in the PLT series. It can be used as the base axis in multi-axis systems for very high loads, but is also suitable as a single axis. With travel distances ranging from 300 mm to 1000 mm, the PLT320 offers a number of options for addressing a range of applications. Designed for industrial environments In common with all the stages in the PLT series, the PLT320 is suitably protected for use in industrial environments. It is characterized by a robust casing and solid drive concept.

PLT240-AC

PLT240-AC Precision linear stage The PLT240-AC is equipped with an AC servo motor for a powerful drive in combination with a high precision ball screw. The AC servo motor also enables seamless connection to conventional industrial control systems. Easy to combine With a width of 240 mm, the linear stage is the ideal model for multi-axis systems. Thanks to its great versatility, its applications could include use as an XY system in combination with the DT240 rotary stage or the HT240 lifting stage. Designed for industrial environments The form and function of the PLT series meet the particel and dust protection requirements as well as lifetime and availability stipulations of industrial environments. Whether it is used in laser engineering, semiconductor technology or special-purpose machinery manufacture, the PLT240-AC is guaranteed to rise to the challenge.

PLT240-DLM

PLT240-DLM Precision stage with high acceleration With an integrated linear motor, the PLT240-DLM achieves high acceleration and speed levels, while a built-in linear measuring system ensures high precision. In addition, the profile rail bearings help to ensure that the stage is both robust and reliable. Ideal as a combination axis With a width of 240 mm, the linear stage is the mid-sized model in the PLT series. It can be used as a single axis for average-size loads or combined with other stages in the PLT series for a range of light to heavy load applications. For industrial environments The PLT240 features a metal cover strip and an extremely robust casing, allowing it to withstand the harsh conditions of industrial environments. As a standard stage, it is well suited for laser material processing with high demands on precision.

PLT165-AC

PLT165-AC Precision stage for industrial environments The PLT165-AC uses a powerful AC servo motor for its precision ball screw. The optionally integrated linear measuring system ensures high precision and excellent repeatability. Vertival and horizontal applications With a width of 165 mm, this stage s ideal for all special machines with limited space. Due to its preloaded ball screw together with a magnetic brake, the PLT165-AC is ideal in horizontal as well as vertical applications. High load capacity The PLT165 with AC servo motor is specially designed for industrial applications - whether as a positioning unit for laser optics, sensor systems or as a component feed. It is suitable for everyday use in industrial environments and provides a long lifetime.

PLT165-DLM

PLT165-DLM Robust precision stage The drive concept of this linear stage is based on a linear motor, thus allowing high acceleration and speed. This makes the linear stage ideal for horizontal applications where these characteristics are required. Made for industrial applications With a width of 165 mm, the PLT165 is the narrowest in its series. It is used as a single axis or as the top axis in multi-axis systems. The protect housing and metal strip cover design ensure protection against dust and particles in industrial environments. Versatile fields of application The PLT165 with dynamic linear motor is suitable for all areas of industry in which the precise adjustment of probes, sensors or optics is required - such as, for example, lacer machining, semiconductor technology or measurement egineering.

LA110-EDLM

LA110-EDLM Universal, modular XYZ infeed axis The linear axis has been designed as a universal axis module. It is used as a high performance component for multi-axis systems or gantry systems and achieves high speed thanks to its dynamic linear motor. Ideal for pick and place applications Flexibly combinable to powerful multi-axis systems High repeatability up to 0.4 µm High dynamics at speeds up to 1000 mm/s Suitable for frequent start-stop phases with accelerations up to 20 m/s2 Flexible travels from 250 – 750 mm Fields of application Automation, multi-axis pick-and-place system design, process automation, additive manufacturing, 3D printing, assembly systems, multi-axis systems, gantry

LA250-DLM

LA250-DLM Linear axis on granite base for highest demands This linear axis is designed to precisely positioning of very high loads with particularly long travels of 500 mm up to 2000 mm. The basis of this positioning system is a granite plate, which allows excellent resolution values to be achieved. The drive concept is based on a dynamic linear motor and a linear measuring system, whereby high speeds and accelerations are achieved with high precision and very good reproducibility. Ideal for inspection systems and pick-and-place systems High repeatability up to 0.4 µm High dynamic at speeds up to 2060 mm/s Very high load capacity up to 3100 N Excellent flatness up to 1.5 µm Long travels from 500 - 2000 mm Fields of application metrology, inspection systems, laser processing, tool measurement, parts measurement, surface inspection, assembly systems, testing systems, quality assurance, pick-and-place systems

LA340-EDLM

LA340-EDLM Highly dynamic linear stage with air bearing The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime. Ideal for particle-free, highly dynamic applications with high precision Perfect flatness and high repeatibility up to ± 0.3 µm Highly dynamic at speeds of up to 2060 mm/s High load up to 50 kg Suitable for maintenance-free 3-shift operation in clean room Options: Travels from 500 - 2000 mm Versions for clean room, laboratory or production Optionally with base plate and frame Different measuring system resolutions up to 0.001 µm Customized development with 3D design, prototypes, large series production Fields of application linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation

LA85-DC

LA85-DC Easy to integrate for horizontal and vertical applications This compact and robust linear axis is easy to integrate and is characterized by an optimum price-performance ratio together with precise operating parameters. For this reason, this linear axis is favored for large and small series. Ideal for high precision focusing of sensors or optics Perfect flatness with up to ± 0.6 µm Load capacity up to 45 N Options: DC motor or stepper motor Linear scale Configuration for clean room, vaccum, beam, laboratory or production Customized development with 3D design, prototypes, series production Fields of application Focusing of sensors or optics, laboratory automation, setup of scanning applications, inspection, handling systems, printing, multi-axis systems, positioning system, 3D printing

LA85-SM

LA85-SM Integratable for horizontal and vertical applications This compact and robust linear axis is easy to integrate and is characterized by an optimum price-performance ratio together with precise operating parameters. For this reason, this linear axis is favored for large and small series. Ideal for high precision focusing of sensors or optics Perfect flatness with up to ± 0.6 µm Load capacity up to 45 N Options: Available with DC motor or stepper motor With linear scale for a highly accurate measurement of the actual position up to ± 0.3 µm Version for clean room and vacuum on request Fields of application Focusing of sensors or optics, setup of scanning applications, laboratory microskopy, handling systems, printing, multi-axis systems, 3D printing, research and development

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