KT500-EDLM
XY Stages

Highly dynamic XY stage with 350 mm travel, 0.3 µm repeatability, 30 kg load

Flat, precise and fast

The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible.

Highly dynamic XY system with long lifetime

High-precision repeatability up to 0.3 µm

Time savings in start-stop operation by top speeds of up to 400 mm/s and an acceleration of 1G

Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary

Life expectancy up to two million full strokes

Available with up to two electrodynamic linear motors per direction: 2+2 motors for particularly fast scan results, 2+1 motors for equal dynamics

Fields of application

Fast scanning applications and dynamic trajectory e.g. semiconductor inspection, metrology equipment, automatic optical inspection (AOI), measuring equipment, differential measurement, replacement for air bearing stages

Specifications

KT500		-350-EDLM-L
Travel	[mm]	350
Repeatability unidirectional	[μm]	± 0.3
Repeatability bidirectional	[μm]	± 0.4
Accuracy	[μm]	± 10
Flatness	[μm]	± 10
Straightness	[μm]	± 5
Positioning speed	[mm/s]	200
Max. speed	[mm/s]	400
Max. acceleration	[m/s²]	1000
Max. load Fx	[N]	25
Max. load Fy	[N]	25
Max. load Fz	[N]	100
Max. torque Mx	[Nm]	11
Max. torque My	[Nm]	11
Max. torque Mz	[Nm]	11
Pitch	[µrad]	± 190
Yaw	[µrad]	± 95
Length	[mm]	500
Width	[mm]	500
Height	[mm]	90
Motor		Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
Feedback		Linearmesssystem, Linear Scale

Controllers

FMC 300

Installation module for dynamic applications and high loads and voltage.

ACS

We support integration of our systems into your ACS environment

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

Download

STM_KT500-350-EDLM-L_xy_stage_datenblatt_deutsch.pdf

STM_KT500-350-EDLM-L_xy_stage_data-sheet_english.pdf

STM_KT500-350-EDLM-L_xy-stage_interface.pdf

STM_KT500-350-EDLM-L_xy-stage-step-file.zip

Customize system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10^-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

Dowload our product catalogue: