Vacuum / Clean Room XY stages

Our high-precision cross tables are universally applicable and, with their drainage values and residual pressures of up to 10-6mbar - or even better, meet the special requirements in research, development and modern semiconductor technology.

KDT310

KDT310 - Vacuum / Clean Room XY stages
Precise high load XY stage HV / UHV, 100 mm travel, 90 - 150 mm aperture, 0.7 µm repeatability, 20 kg load...

KLT300

KLT300 - Vacuum / Clean Room XY stages
Stable high load xy stage HV / UHV / EUV, 10 mm travel, 80 mm aperture, 0.7 µm repeatability, 30 kg...

KDT105

KDT105 - Vacuum / Clean Room XY stages
High resolution XY stage HV / UHV / EUV, 50 mm travel, 40 mm aperture, 0.3 µm repeatability, 3 kg load...

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0

elger.matthes(at)steinmeyer.com