Vacuum XY stages
Our high-precision cross tables are universally applicable and, with their drainage values and residual pressures of up to 10-6mbar - or even better, meet the special requirements in research, development and modern semiconductor technology.
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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