Vacuum / Clean Room linear stages and axes

Depending on the application, we offer linear tables with a variety of different drives and guides for residual pressures up to 10-6mbar - or even better. Within a series, the modular linear tables can be easily combined with each other.

MT105

MT105
Customizable micro stage 10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load ...

LT300

LT300
Precise high load linear stage HV / UHV / EUV, 50 - 100 mm travel, 0.5 µm repeatability, 10 kg load Vacuum:...

LA170

LA170
Precise high load XYZ linear axis HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg...

LA97

LA97
Nanometer linear stage HV / UHV up to 10^-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg...

LA92

LA92
High Speed Linear Axis HV / UHV / EUV, 40 mm travel, 0.4 µm repeatability, up to 2 kg load Vacuum: all areas...

LA85

LA85
Compact focus linear stage HV / UHV, 25 mm travel, 1.6 µm repeatability, 4 kg load Vacuum: all ranges HV /...

LA80

LA80
High speed linear stage HV / UHV / EUV, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load Vacuum: all...

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
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