Vacuum / Clean Room linear stages and axes
Depending on the application, we offer linear tables with a variety of different drives and guides for residual pressures up to 10-6mbar - or even better. Within a series, the modular linear tables can be easily combined with each other.
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Dowload your product catalogue:
