High-performance positioning solutions for wafer and chip production

We will find the best technical solution for you to increase your throughput and make inspection processes more effective. We develop the desired systems customized to your application - from test labs to automated semiconductor factories up to ISO 14644-1 up to class 1. Use our proven solutions for demanding conditions such as HV, UHV and EUV für Restdrücke bis 10-12 mbar.

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