High-performance positioning systems for maximum resolutions
Find technically revolutionary solutions for your lithography and inspection tasks - with our µm know-how for 150 years of experience. We also support you under extreme conditions such as HV, UHV and EUV. Take advantage of our entire team of experts directly at one location: for development, production, micro-assembly, software, testing and certification.
Result: State-of-the-art technologies for lithography and inspection tasks. In the shortest possible time.
Particularly high system quality
by own parts production, precise measuring equipment and strictest guidelines for quality assurance0,91 % complaint rate in 2019
Reduce manufacturing costs
by fast 3D designs, certified measurement technology and prototypes up to series productionCleanroom series products up to ISO Class 1
by fast and flexible development with µm experts who implement your strong ideas150 years customized solutions