XYZ positioning system for automated inline wafer inspection e.g. layer thickness measurement | travels in XY up to 650 mm, Z 100 mm
Inspection and Mikroscopy


Automated XYZ inline wafer inspection with large sample capacity

This inspection system is specially designed for automated quality control of large and flat carrier up to 50 kg. The positioning system allows simultaneous positioning of sensor in Z and specimen in XY on a very compact footprint. The robust system also allows the use of heavy sensors or camera systems up to 20 kg in Z. The spindle drive, in combination with a spindle brake, guarantees optimum self-holding, so that a vertical position can be maintained in the de-energized state. The low-emission all-round enclosed system is also suitable for harsh industrial environments under dust and smoke. A suspension system has been attached to the granite for cable routing.


Compact design with optimized price/performance ratio

  • Ideal for surface inspection of large carriers up to 650 x 650 mm
  • Precise measurement with repeatability up to 2 µm
  • Good price-performance ratio due to drive with stepper motor
  • Strong and robust Z-axis for sensors, microscopes and cameras up to 20 kg
  • Suitable for industrial environments e.g. dust, smoke

Optionally expandable:

  • Various travels up to 1000 mm
  • With/without frame and base plate made of granite or aluminum
  • Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system
  • Individual solutions for cable routing
  • Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers
  • Immediate use with pre-configured controller incl. exemplary software


Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


Fields of application

Automated inline inspection and microscopy of large samples e.g. wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, layer thickness measurement, AOI, quality assurance in dusty fuming environments, surface inspection, investigation of deposits, scratches, surface irregularities.

Travel[mm] 650650100
Repeatability unidirectional[µm]± 3.9± 3.9± 3.9
Repeatability bidirectional[µm]± 4.4± 4.4± 4.4
Positioning Speed[mm/s]555
Max. load[N]3001000160
MotorStepper MotorStepper Motormanual
FeedbackOpen LoopOpen Loopnone


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

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Are you looking for the best technical solution?

Get your first 3D design in just a few days:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0