µm-accurate positioning and nanometer stability during measurement

The gantry design enables highly dynamic movements over an area of 1,200 x 1,400 mm (adapted to the application and the available space) with a repeatability of 0.3 µm, thus guaranteeing high throughput with consistent quality. In the horizontal XY level, integrated linear motors ensure process speeds of 500 mm/s, while on the vertical Z axis the AC servo achieves values of up to 200 mm/s. The customized processing head or sensor on the Z-axis moves quickly and smoothly over the carriers on the granite. The traverse is suitable for loads up to 10 kg, while the height can vary up to 500 mm depending on the application and component height.
 

Variety of individual customization options

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

High-dynamic laser applications, quality inspection, metrology, process monitoring, wafer inspection, bond inspection, optical microscopy, surface measurement, microlaser joining, microlaser welding, laser micromachining, microlaser cutting