Standard Stages by product category

Linear Stages

Modular linear stages, Travel up to 2000 mm, Rep up to 0.3 µm, Load up to 310 kg, Speed up to 4120 mm/s

Miniature Stages

Miniature Linear Stages, Travel 10 - 80 mm, Rep up to 0.2 µm, Load up to 9 kg, Speed up to 100 mm/s

XY Stages

XY Kreuztische als präzises Positioniersystem
Precision XY Stages, Travel up to 450 x 450 mm, Rep up to 0.2 µm, Load up to 30 kg, Speed up to 1400 mm/s

Rotary Stages

Rotary Stages
Rotary positioner, travel up to n x 360° (unlimited), rep up to 0.0001°, load up to 15 kg, speed up to 1500°/s

Lifting Stages

Z vertical stages, Travel up to 25 mm, Rep up to 0.7 µm, Load up to 45 kg, Speed up to 10 mm/s

Multi Axes Systems

XYZ-Rx-Ry-Rz motions, Travel 5 - 2400 mm, Rep up to 0.3 µm, Speed up to 1500 mm/s

Vacuum, Cleanroom

Up to cleanroom class ISO 2–1, vacuum HV / UHV, radiation: DUV / EUV, Magnetisim Versions

Controller

Single & multi-axis motion controller, integrated systems, PLC / ACS integration

Filter Standard Stages by criteria

Customized and highly demanding positioning systems

Series Components

Customized components
Custom series components and series assemblies

Inspection Systems

Custom positioning systems for cleanrooms, laboratory and production

Cleanroom Stages

Clean room / vacuum X, XY, Z stages for HV, UHV and UV, DUV, EUV radiation

Cleanroom Systems

Clean room / vacuum XYZ-R multi-axis systems for HV, UHV and UV, DUV, EUV radiation