Semiconductor Manufacturing & Handling
For you we develop customized solutions in standard, electron beam and EUV lithography for assembly or integration into your application. For this we offer systems for beam shaping, beam homogenization or beam equalization and zoom e.g. adjustment for microstructuring, beams as well as lens and mask positioning or filter adjustment.
Custom Positioning Systems
Standard Axes & Stages
Vacuum / Cleanroom Stages
Multi Axes Systems
Ball & Lead Screw Drives
Individual customization and development of your innovation
- Optimal positioning solution for your application with a fast and free 3D design
- Design of functional samples, prototypes up to series production
- Integrated development of your mechanics, electronics and software
- Series production of your innovation on > 3.900 m² production area
Cleanroom systems up to Class 2
On more than 100 m2 of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 2.
More on series development
Vacuum standard axes up to 10-12
Our high-precision modular vacuum stages for linear, lifting, rotary and XYZ positioning have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation.
Go to Vacuum Standard axes
Individual life cycle tests
We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.
More about test and measurement
Katja Weißbach
Consulting
T +49 351 88585-64
E-Mail
Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail
Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
