Vacuum Multi Axes Systems


XYZ manipulator

Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry running for best possible vacuum compatibility, high bake-out temperature and supers table design due to piezo brakes.

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Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0