Vacuum / Cleanroom Multi Axes Systems

Our repertoire includes complex experimental systems and combinations of standard axes used as multi-axis manipulators. The systems shown here are examples of some possible ways of combining our cleanroom and vacuum-compatible stages.


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
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