Vacuum / Clean Room Multi Axes Systems

Our repertoire includes complex experimental systems and combinations of standard axes used as multi-axis manipulators. The systems shown here are examples of some possible ways of combining our vacuum-compatible stages.

camera manipulator

camera manipulator - Vacuum / Clean Room Multi Axes Systems
Quite a complex mechanism designed for an experiment at Bessy. The manipulator is panning an ex-ray detector...

LA80-2LA95

LA80-2LA95 - Vacuum / Clean Room Multi Axes Systems
Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load This...

2PLT240-HT160

2PLT240-HT160 - Vacuum / Clean Room Multi Axes Systems
XYZ-System für das Hochvakuum Vakuum-Positioniersystem für Lasten bis 15 kg. Kugelgewindetriebe in den...

2LA95

2LA95 - Vacuum / Clean Room Multi Axes Systems
XZ system with piezo brake (UHV) UHV-system with 7 x 7 mm stroke. Dry running, piezo brake, lead screw,...

3LA170

3LA170 - Vacuum / Clean Room Multi Axes Systems
Heavy duty XYZ system (UHV) Heavy duty three axes manipulator for loads up to 20 kg in vacuum. Dry running,...

3 Axis Beam Aligner

3 Axis Beam Aligner - Vacuum / Clean Room Multi Axes Systems
This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for...

3LA95

3LA95 - Vacuum / Clean Room Multi Axes Systems
XYZ-System mit Piezobremse (UHV) Three coordinate manipulator with stroke of 5 x 20 x 10 mm and loads up to...

sample manipulator

sample manipulator - Vacuum / Clean Room Multi Axes Systems
In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator....

LA97-MT85

LA97-MT85 - Vacuum / Clean Room Multi Axes Systems
A three axes magnet free stage system. Strokes are at 200 mm for x and each 10 mm for y and z (vertical)....

sample fixation (non

sample fixation (non magnetic, UHV) - Vacuum / Clean Room Multi Axes Systems
In order to protect the delicate probe in its equally delicate probe holder this probe holder was designed....

linear stage with two

linear stage with two lifting stages - Vacuum / Clean Room Multi Axes Systems
A robust PLT240 in vacuum preparation is carrying two lifting stages. All stages are driven by vacuum...

3LT300

3LT300 - Vacuum / Clean Room Multi Axes Systems
XYZ manipulator Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry running...

KT120

KT120 - Vacuum / Clean Room Multi Axes Systems
non magnetic XY stage This is a standard xy-stage with 10 mm stroke. Resolution is 5 nm. The stage features...

Coaxial rotary table

Coaxial rotary table with two rotation and longitudinal movement (UHV) - Vacuum / Clean Room Multi Axes Systems
This rather exotic UHV-assembly combines two coaxial rotational axes which can be moved axially during...

2PLT240-HT160

2PLT240-HT160 - Vacuum / Clean Room Multi Axes Systems
XYZ-System für Hochvakuum Vacuum system for up to 15 kg. Ball screw drives are used in XY and in the...

Polarization Transform

Polarization Transform - Vacuum / Clean Room Multi Axes Systems
UHV mirror adjuster for Beamline This UHV positioning unit tilts into the beam by rope pulley driven from...

    1. Your customized system



    1. Your contact details
    2. *lease read our data protection regulations here before sending the contact form.

Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0

elger.matthes(at)steinmeyer.com