sample manipulator
Vacuum Custom Systems


In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator. Capacitive sensors are used for feedback. The pairs of piezo motors are pushing ceramic rods which are part of a systems of spring preloaded rope pulleys. Motion increments of nanometers are achieved. Have fun understanding the system and regards to Dr. Tino Noll!

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Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0