sample manipulator
Vacuum / Cleanroom Multi Axes Systems
782442:001.26
In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator. Capacitive sensors are used for feedback. The pairs of piezo motors are pushing ceramic rods which are part of a systems of spring preloaded rope pulleys. Motion increments of nanometers are achieved. Have fun understanding the system and regards to Dr. Tino Noll!
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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