Custom, UHV & EUV and magnet free
Where cleanroom environments, vacuum, and EUV technology converge, standard positioning systems quickly reach their physical limits. Our solutions are precisely engineered for these extreme conditions - from HV up to UHV, from UV up to EUV, from ISO 6 up to ISO 1, and from low-magnetic to non-magnetic designs. Each system is developed, manufactured, and assembled in a cleanroom with optimized materials, tribology, and thermal behavior.
The following systems can be flexibly adapted to the application, environment, and process. Alternatively, we develop a solution specifically tailored to your process and available installation space.
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Linear Stages >
Modular linear stages | UHV, EUV, ISO 4–6 | Travel up to 850 mm, Rep up to 0.002 µm, Load up to 20 kg
XYZ Stacked >
XYZ compact systems | UHV, EUV, ISO 4–6 | Travel up to 50 mm, Rep up to 0.2 µm, Load up to 1 kg
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XY Stages >
XY Stages | UHV, EUV, ISO 4 - 6 | Travel up to 170 mm, Rep up to 0.003 µm, Load up to 30 kg
Multi-Axis Systems >
XYZ-R+ combinations | UHV, EUV, ISO 2 - 6 | complex systems, e.g., hard X-ray radiation, 1 Tesla, …
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Rotary Stages >
Rotary stages | UHV, EUV, ISO 4–6 | Travel unlimited, Rep up to 0.0002°, Load up to 15 kg
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Lifting Stages >
Vertical Stages | UHV, EUV, ISO 4–6 | Travel up to 25 mm, Rep up to 0.3 µm, Load up to 40 kg
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Your engineering advantages:
| Optionally expandable:
In short: Tailor-made, high-precision positioning technology for extreme environments where standard solutions reach physical limits. |
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
