Custom-engineered up to UHV · EUV · Cleanroom ISO 2–1
Where cleanroom environments, vacuum, and EUV technology converge, standard positioning systems quickly reach their physical limits. Our solutions are precisely engineered for these extreme conditions—from HV up to UHV, from UV up to EUV, from ISO 6 up to ISO 1, and from low-magnetic to non-magnetic designs. Each system is developed, manufactured, and assembled in a cleanroom with optimized materials, tribology, and thermal behavior.
The following systems can be flexibly adapted to the application, environment, and process. Alternatively, we develop a solution specifically tailored to your process and available installation space.
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Linear Stages >
Modular linear stages | UHV, EUV, ISO 4–6 | Travel up to 850 mm, Rep up to 0.002 µm, Load up to 20 kg
XYZ Stacked >
XYZ compact systems | UHV, EUV, ISO 4–6 | Travel up to 50 mm, Rep up to 0.2 µm, Load up to 1 kg
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XY Stages >
XY Stages | UHV, EUV, ISO 4 - 6 | Travel up to 170 mm, Rep up to 0.003 µm, Load up to 30 kg
Multi-Axis Systems >
XYZ-R+ combinations | UHV, EUV, ISO 2 - 6 | complex systems, e.g., hard X-ray radiation, 1 Tesla, …
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Rotary Stages >
Rotary stages | UHV, EUV, ISO 4–6 | Travel unlimited, Rep up to 0.0002°, Load up to 15 kg
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Lifting Stages >
Vertical Stages | UHV, EUV, ISO 4–6 | Travel up to 25 mm, Rep up to 0.3 µm, Load up to 40 kg
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Your engineering advantages:
| Optionally expandable:
In short: Tailor-made, high-precision positioning technology for extreme environments where standard solutions reach physical limits. |
Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.
We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
