Standard, electron beam and EUV lithography

For you we develop customized solutions in standard, electron beam and EUV lithography for assembly or integration into your application. For this we offer systems for beam shaping, beam homogenization or beam uniformization and zoom e.g. adjustment for microstructuring, steels as well as lens mask positioning or filter adjustment.

EUV knowhow
more than 10 years experience

magnet-free systems with lowest particle emission

Multiple million
cycles maintenance free

lubricated for the entire lifetime

5 nm
and even higher repeatability.

with custom developments and controllers.

Configure the solution for your applications now

Inform us abour your exact requirements online, so that you can reach your targets as soon as possible.

    1. Your customized system

    1. Your contact details
    1. *lease read our data protection regulations here before sending the contact form.

Individual customization and development of your Innovaiton

  • Optimal positioning solution for your application with a fast and free 3D design
  • Design of functional samples, prototypes up to series production
  • Integrated development of your mechanics, electronics and software

Customization to your specific process requirements

Cleanroom systems up to Class 1

On more than 100 m2 of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 1.

More on series development

Vacuum standard axes up to 10-12

Our high-precision modular vacuum axes have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation in the submicron range. Go to Vacuum Standard axes

Individual life cycle tests

We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.

More about test and measurement

Are you looking for the best technical solution?

We are positioning your idea, no matter how unorthodox it is. Get in touch with us:


Was spricht für uns mehr, als unsere Kunden?

Dipl.-Ing. Elger Matthes
Development, Consulting,
Concepts, Innovation

+49 351 88585-0

Nadine Strudel

+49 351 88585-44