EUV adjuster
Vacuum / Cleanroom Multi Axes Systems

782479:001.26
EUV adjuster - Vacuum / Cleanroom Multi Axes Systems

 

UHV mirror adjuster for Beamline

This UHV positioning unit tilts into the beam by rope pulley driven from outside the vacuum chamber. Thus the mirror system changes linear polarized light into circular polarized light. For control of the circular polarization the mirror unit can be rotated around the beam by means of a steel band pulley.

 


Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0
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