Linear Axes
Our linear axes are universal in use and can be integrated easily in the setup of various applications.
Motors
Feedback
High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090…
Focus axis (ball screw), travel 25 - 50 mm, rep ± 0.5 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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