Linear Axes

High-performance linear axis with 500 - 2000 mm travel, 0.3 µm repeatability, 50 kg load

Micrometer linear stage with air bearings

The LA340 linear stage, with a width of 340 mm, is based on a granite plate and was constructed with air bearings. This allows it to be used for all applications that require perfect flatness, the smallest tolerances for pitch and yaw as well as smooth running characteristics.

  • Ideal for scanning applications or high-precision positioning
  • Very high repeatability up to ± 0.3 µm
  • High dynamics at speeds up to 2060 mm/s
    • Load capacity up to 500 N
    • Perfect flatness with up to ± 0.8 µm
    • Extra long lifetime
    • Clean room variant available

    High dynamics with perfect planarity

    The drive concept of this linear axis is based on a dynamic linear motor and a linear measurement system, whereby high speeds and accelerations are achieved with high precision and excellent repeatability.

    Fields of application

    Precision positioning in metrology, inspection, laser machining, photonics, precision scanning, semiconductor or flat panel display manufacturing

    Modell LA340-500-EDLM-L-1000-EDLM-L-1500-EDLM-L-2000-EDLM-L
    Travel [mm] 500100015002000
    Repeatability unidirectional [μm]± 0.3± 0.3± 0.3± 0.3
    Repeatability bidirectional [μm]± 0.4± 0.4± 0.4± 0.4
    Accuracy [μm]± 1.9± 3± 4.1± 5.2
    Flatness [μm]± 0.8± 1.5± 2.3± 3
    Straightness [μm]± 0.8± 1.5± 2.3± 3
    Positioning speed [mm/s]790121016302060
    Max. acceleration [m/s2]16253540
    Max. load Fx [N]100100100100
    Max. load Fy [N]500500500500
    Max. load Fz [N]500500500500
    Max. torque Mx [Nm]30303030
    Max. torque My [Nm]50505050
    Max. torque Mz [Nm]30303030
    Pitch [µrad]± 11± 16± 19± 20
    Yaw [µrad]± 11± 16± 19± 20
    Length [mm]1060156020602560
    Width [mm]379379379379
    Height [mm]310310310310
    Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved. Please contact us.

      1. Your customized system

      1. Your contact details
      1. *lease read our data protection regulations here before sending the contact form.

    Are you looking for the best technical solution? Get in touch with us:

    Nadine Strudel

    +49 351 88585-44