LA340-EDLM
Linear Axes
High-performance air bearing linear stage, travel 500 - 2000 mm, rep 0.3 µm, load 50 kg, speed 4120 mm/s
Highly dynamic linear stage with air bearing
The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.
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Fields of application
linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation
| LA340-EDLM | 782469:012.24 | -500-EDLM-L | -1000-EDLM-L | -1500-EDLM-L | -2000-EDLM-L | |
| Travel | [mm] | 500 | 1000 | 1500 | 2000 |
| Repeatability unidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.3 | ± 0.3 |
| Repeatability bidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
| Accuracy | [μm] | ± 1.9 | ± 3 | ± 4.1 | ± 5.2 |
| Flatness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Straightness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Positioning speed | [mm/s] | 790 | 1210 | 1630 | 2060 |
| Max. speed | [mm/s] | 1580 | 2420 | 3260 | 4120 |
| Max. acceleration | [m/s2] | 16 | 25 | 35 | 40 |
| Max. load Fx | [N] | 100 | 100 | 100 | 100 |
| Max. load Fy | [N] | 500 | 500 | 500 | 500 |
| Max. load Fz | [N] | 500 | 500 | 500 | 500 |
| Max. torque Mx | [Nm] | 30 | 30 | 30 | 30 |
| Max. torque My | [Nm] | 50 | 50 | 50 | 50 |
| Max. torque Mz | [Nm] | 30 | 30 | 30 | 30 |
| Pitch | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Yaw | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Length | [mm] | 1060 | 1560 | 2060 | 2560 |
| Width | [mm] | 379 | 379 | 379 | 379 |
| Height | [mm] | 310 | 310 | 310 | 310 |
| Weight | [kg] | 370 | |||
| Weight with frame | [kg] | 640 | |||
| Bearing | Air Bearing | ||||
| Motor | Ironless Dynamic Linear Motor | ||||
| Feedback | Linear Scale | ||||
| Resolution Measuring system | 0.05 µm (optionally up to 0.001 µm) | ||||
| Material | Anodized Aluminum, Granite | ||||
| Optional features | Frame | ||||
| Variants clean room | up to clean room class ISO 6 (higher on request) | ||||
| Variants beam | UV (DUV, EUV, X-ray, gamma on request) | ||||
| Variants Magnetism | Magnetic | ||||
| Variants vacuum | on request | ||||
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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