LA340-EDLM
Linear Axes
High-performance linear axis with 500 - 2000 mm travel, 0.3 µm repeatability, 50 kg load
Micrometer linear stage with air bearings
The LA340 linear stage, with a width of 340 mm, is based on a granite plate and was constructed with air bearings. This allows it to be used for all applications that require perfect flatness, the smallest tolerances for pitch and yaw as well as smooth running characteristics.
|
|
|
|
|
|
|
High dynamics with perfect planarity
The drive concept of this linear axis is based on a dynamic linear motor and a linear measurement system, whereby high speeds and accelerations are achieved with high precision and excellent repeatability.
Fields of application
Precision positioning in metrology, inspection, laser machining, photonics, precision scanning, semiconductor or flat panel display manufacturing
| Modell LA340 | -500-EDLM-L | -1000-EDLM-L | -1500-EDLM-L | -2000-EDLM-L | |
| Travel | [mm] | 500 | 1000 | 1500 | 2000 |
| Repeatability unidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.3 | ± 0.3 |
| Repeatability bidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
| Accuracy | [μm] | ± 1.9 | ± 3 | ± 4.1 | ± 5.2 |
| Flatness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Straightness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Positioning speed | [mm/s] | 790 | 1210 | 1630 | 2060 |
| Max. acceleration | [m/s2] | 16 | 25 | 35 | 40 |
| Max. load Fx | [N] | 100 | 100 | 100 | 100 |
| Max. load Fy | [N] | 500 | 500 | 500 | 500 |
| Max. load Fz | [N] | 500 | 500 | 500 | 500 |
| Max. torque Mx | [Nm] | 30 | 30 | 30 | 30 |
| Max. torque My | [Nm] | 50 | 50 | 50 | 50 |
| Max. torque Mz | [Nm] | 30 | 30 | 30 | 30 |
| Pitch | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Yaw | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Length | [mm] | 1060 | 1560 | 2060 | 2560 |
| Width | [mm] | 379 | 379 | 379 | 379 |
| Height | [mm] | 310 | 310 | 310 | 310 |
| Motor | |||||
| Feedback |
