Camera Manipulator (RICXS experiment)
Vacuum / Cleanroom Multi Axes Systems
782441:001.26
Vacuum multi-axis system
1 Tesla at 10E-8 mbar (UHV), hard X-ray beam, 42 piezo motors
RICXS experiment: (Resonant Inelastic X-ray Scattering) at the Bessy for use in synchrotron radiation research
- Swiveling a camera around super magnets 1T at 10E-8 mbar
- Adjustment of monitoring distance, upstream apertures, samples in the magnet
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Special features:
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Operation
The camera is swiveled around the magnet with the sample in two degrees of freedom and the distance to the swivel center is adjustable. The entire setup can be moved out of the vacuum chamber for maintenance (extreme magnetic field at the magnet at 10E-8 mbar)
All drives close to the magnet are designed with piezo motors. Several motors are operated in parallel to generate the necessary forces. Such motors are installed in the A-Drive, which moves the camera forwards and backwards, and in the aperture adjuster in front of the camera.
The drives for the swivel movements are positioned away from the magnet so that cost-optimized stepper motors can also be used here. These operate via dry-running worm gears and pulley, which ultimately generate the swivel movement. A curved guide with circumferential PEEK balls had to be developed for this purpose.
Application fields
Magnetic field measurement, research to increase storage density on hard disks, research, product development, visualization of magnetic functions in materials in an active state (you can "watch" magnetism and fundamentally understand magnetism better)
References
About the experiment (external link): https://jlsrf.org/index.php/lsf/article/view/81
Press Release at www.konstruktion-entwicklung.de (external link): https://www.konstruktion-entwicklung.de/magnetismus-an-schaltungen-dreidimensional-sichtbar-machen
| 782441:001.26 | X | Rz | Ry | Xr | y | |
| Motion | Feeding unit | Swivel unit horizontal | Swivel unit vertical | Focus | Aperture | |
| Travel | [mm; deg] | 300 | ± 45 | +5 | -18.5 | 300 | 200 |
| Repeatability unidirectional | [µm; deg] | ± 5 | ± 0,1 | ± 0,1 | ± 0,3 | ± 5 |
| Repeatability bidirectional | [µm; deg] | ± 10 | ± 0,2 | ± 0,2 | ± 1 | ± 10 |
| Positioning speed | [mm/s; deg/s] | 5 | 1 | 1 | 5 | 5 |
| Max. speed | [mm/s; deg/s] | 10 | 2 | 2 | 10 | 10 |
| Max. load | [N] | 2500 | 200 | 200 | 100 | 5 |
| Weight | [kg] | 1110 | ||||
| Lubrication liquid | [mbar] | minimal, up to 10-8 | ||||
| Lubrication dry | [mbar] | up to 10-8 | ||||
| Max. Bakeout temperature | [deg] | 80 | ||||
| Drive | Ball Screw 1432/4.16.398.453BR T7 | Worm Gear, Pulley | Worm Gear, Pulley | |||
| Motor | Stepper Motor | Stepper Motor | Stepper Motor | Piezo Motor | Piezo Motor | |
| Feedback | Linear Scale | Angular Scale | Angular Scale | Linear Scale | Linear Scale | |
| Optional features | custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |||||
| Variants cleanroom | up to clean room class ISO 6 (higher on request) | |||||
| Variants beam | UV, DUV, EUV, X-ray (gamma on request) | |||||
| Variants magnetism | magnetic, low-magnetic, magnet-free in center | |||||
| Variants vacuum | all ranges up to 10E-8 mbar HV / UHV | |||||
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