3LT300
Vacuum / Cleanroom Multi Axes Systems
782475:003.26
XYZ manipulator
Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry running for best possible vacuum compatibility, high bake-out temperature and supers table design due to piezo brakes.
FMC 220
Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously
FMC 250/280
Multi-axis controller with increased current and voltage for point-to-point positioning.
FMC400/450
Multi-axis controller fully ready for tracking, simple creation of own programs.
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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