3LA170
Vacuum / Cleanroom Multi Axes Systems
782475:030.26
Heavy duty XYZ system (UHV)
Heavy duty three axes manipulator for loads up to 20 kg in vacuum. Dry running, piezo brake, lead screw, stepper motor. Includes measuring system for feedback of the actual position.
| 782475:030.26 | X | Y | Z | ||
| Standard System | LA170-060 | LA170-130 | LA200-100 | ||
| Travel | [mm] | 60 | 130 | 100 | |
| Repeatability unidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | |
| Repeatability bidirectional | [μm] | ± 0.5 | ± 0.5 | ± 0.5 | |
| Positioning speed | [mm/s] | 5 | 5 | 5 | |
| Max. speed | [mm/s] | 10 | 10 | 10 | |
| Max. load Fx | [N] | 196 | 196 | 196 | |
| Length x Width x Heigt | [mm] | 405 x 280 x 365 | |||
| Lubrication liquid | [mbar] | up to 10-8 | |||
| Lubrication dry | [mbar] | up to 10-11 | |||
| Max. Bakeout temperature | [deg] | 120 | |||
| Drive | Lead Screw | ||||
| Motor | Stepper Motor | ||||
| Bearing | cross roller bearings stainless steel, hybrid | ||||
| Feedback | Linear Scale | ||||
| Resolution Measuring system | 0.1 µm, optional 0.001 µm | ||||
| Optional features | with and without measuring system, lead screw with dry lube or ball screw with liquid lube, stabilization with piezo brake, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||||
| Variants clean room | up to clean room class ISO 6 (higher on request) | ||||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||||
| Variants magnetism | magnetic | ||||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||||
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