Multi Axes Systems

Over time, our high-precision stages have been developed into all kinds of combinations. We provide conventional orthogonal XYZ systems, gantry systems in different precision classes, with and without air bearings, and multi-axis combinations for any degree of freedom when moving items. Select a combination that comes the closest to your own application:

XY Theta >

Combined linear and rotational motions (XY-R) within a single plane
XYZ Gantry >

High-speed overhead positioning for high throughput
XYZ Split >

Dynamic, highly modular architecture for multi-process integration
XYZ Lab >

Precision, reliability, and modularity for scalable lab solutions

XYZ Tip-Tilt >

Multi-degree-of-freedom kinematics for active alignment or hexapod substitution
Compact Systems >

Space-saving precision actuator with multi-DOF capabilities
Discover more >

Our standard systems can be individually combined for multiple degrees of freedom

Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages Get in touch with our technical consultant

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
Electrodynamic linear motors (ironless or iron-core).
Piezomotors such as Piezo-Legs^® or Nanomotion^®.

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.