Vacuum / Cleanroom linear stages and axes

Depending on the application, we offer stages with a variety of different drives and guides for cleanroom ISO 6, residual pressures up to 10-6mbar - or even better. Within a series, the modular linear stages can be easily combined with each other.

MDT85-PM

MDT85-PM
Aperture miniature linear stage 114 x 84 x 28 mm, UHV / DUV / EUV, ISO 6, travel 10 mm, rep 0.2 µm, load 1.5...

MT53

MT53
Miniature linear stage 53 x 53 x 20 mm, HV / UHV / DUV / EUV, travel 10 mm, repro 0.2 µm, load 0.8 kg, speed...

MT85-PM

MT85-PM
Precision miniature linear stage 114 x 97 x 28 mm, UHV / DUV / EUV, ISO 6, travel 25 - 50 mm, rep 0.2 µm,...

MT105

MT105
Customizable micro stage 10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load ...

MT130

MT130
EUV miniature linear stage 155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3 µm, load 9...

LT300

LT300
Precise high load linear stage HV / UHV / EUV, ISO 4, 50 - 100 mm travel, 0.5 µm repeatability, 10 kg load ...

LA170

LA170
Precise high load XYZ linear axis HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg load ...

PLT240

PLT240
Precise high-load linear stage HV / UV / DUV, ISO 6, travel 50 - 850 mm, load 100 kg, rep 0.4 µm, width 240 ...

PLT165

PLT165
Präzise UHV Linear Stage UHV / UV / DUV, ISO 6, travel 100 - 500 mm, load 9 kg, rep 3.9 µm, width 165 mm ...

LA97

LA97
Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load ...

LA105

LA105
Translation stage with piezo offset HV / UV / DUV, ISO 3, travel 7 - 100 mm, load 3 kg, rep ± 0.002 µm,...

LA95

LA95
Precision linear stage HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg, Speed 8.4...

LA92

LA92
High Speed Linear Axis HV / UHV / EUV, ISO 4, 40 mm travel, 0.4 µm repeatability, up to 2 kg load ...

LA85

LA85
Focus linear stage HV / DUV, cleanroom ISO 6, travel 25 - 50 mm, rep 1.6 µm, speed 60 mm/s, load 4 kg ...

LA80

LA80
High speed linear stage HV / UHV / EUV, ISO 4, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load ...

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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