Vacuum / Cleanroom linear stages and axes

Depending on the application, linear stages with a wide range of drive concepts and guide systems are available – designed for vacuum environments down to UHV 10E-11 mbar. The systems are compatible with UV / DUV / EUV radiation and suitable for use in cleanrooms up to ISO 4 (up to ISO 2 - 1 on request).
Thanks to their modular design, the linear stages can be easily combined within a series and flexibly configured to meet specific application requirements.

MDT85-PM

MDT85-PM
Aperture miniature linear stage UHV 10E-11 mbar, EUV, ISO6 | Aperture Ø 25 mm | Travel 10 mm | Rep 0.2 µm |...

MT53

MT53
Miniature linear stage UHV 10E-11 mbar, EUV, ISO 4 | Travel 10 mm | Rep 0.2 µm | Load 0.8 kg | Speed 7.5...

LA85

LA85
Focus Linear Stage HV 10E-8 mbar, DUV, ISO 6 | Travel 25 – 50 mm | Rep 1.6 µm | Load 4 kg | Speed 60 mm/s ...

MT85-PM

MT85-PM
Miniature Linear Stage UHV 10E-11 mbar, EUV, ISO4 | Travel 25 – 50 mm | Rep 0.2 µm | Load 1.5 kg | Speed 5...

MT105

MT105
Micro stage UHV 10E-11 mbar, EUV, ISO 4 | Travel 30 – 50 mm | Rep 0.4 µm | Load 5 kg | Speed 7.5 - 75 mm/s ...

LT300

LT300
High-load linear stage UHV 10E-11 mbar, EUV, ISO 4 | Travel 50 – 100 mm | Rep 0.5 µm | Load 10 kg | Speed 10...

LA170

LA170
High Load XYZ Linear Axis HV 10E-9 mbar, EUV, ISO 4 | Travel 60 – 130 mm | Rep 0.5 µm | Load 20 kg | Speed...

PLT240

PLT240
Heavy Load Linear Stage HV 10E-8 mbar, DUV, ISO 6 | Travel 50 – 850 mm | Rep 0.4 µm | Load 100 kg | Speed 30...

PLT165

PLT165
Precise Linear Stage HV 10E-8 mbar, DUV, ISO 6 | Travel 100 – 500 mm | Rep 3.9 µm | Load 9 kg | Speed 50...

LA97

LA97
Nanometer Linear Stage UHV 10E-11 mbar, EUV, ISO 4 | Travel 100 – 300 mm | Rep 0.02 µm | Load 10 kg | Speed...

LA105

LA105
Translation stage with piezo offset HV 10E-9 mbar, EUV, ISO 4 | Travel 7 – 100 mm | Rep ± 0.002 µm | Load 3...

LA95

LA95
Precision linear stage HV 10E-9 mbar, EUV, ISO 4 | Travel 10 – 185 mm | Rep 0.4 µm | Load 4.5 kg | Speed 8.4...

LA92

LA92
High Speed Stage UHV 10E-11 mbar, EUV, ISO 4 | Travel 40 mm | Rep 0.4 µm | Speed 150 mm/s ...

LA80

LA80
High Speed Stage HV 10E-9 mbar, EUV, ISO 4 | Travel up to 500 mm | Rep 0.4 µm | Load 5 kg | Speed 100 mm/s ...

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references