Standard Axes & Stages

Almost all atmospheric standard stages are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages    Get in touch with our technical consultant

Materials

Steinmeyer Mechatronik GmbH predominantly uses aluminum for the structure of multi-axis positioning systems.
In special cases, steel and titanium (e.g., for non-magnetic systems) are also possible.

The reason: aluminum efficiently dissipates localized heat, allowing the system to quickly reach a thermally stabilized state—an essential prerequisite for stable and highly accurate positioning systems.

The lower stiffness of aluminum compared to steel is compensated for by design measures, such as:

• a slightly increased table height
• the use of hollow profiles

Important: An aluminum beam and a steel beam with identical geometry exhibit the same deflection under their own weight. For special requirements—e.g., non-magnetic applications—titanium versions are also available.

Functional surfaces and coatings

In addition to standard surfaces, numerous customer-specific surface and coating concepts are available.
These are specifically designed to achieve very high cleanroom classes—up to ISO 1–2, depending on the application and process.

To meet demanding process requirements, we develop and qualify application-specific functional coatings, including:

• Nickel coatings
• PTFE & KEPLA® coatings
• Fluorinated lubricants
• Dicronite® / dry-film coatings
• Application-specific coating combinations

In addition, the following options are available:

• anodized (cleaned)
• alternative color anodizing
• bare aluminum, cleaned
• Bilatal
• Nickel

These surfaces are suitable, for example, for high purity requirements, chemical resistance (life science), or process-critical environments.

Why functional coatings are crucial (before → after)

• Standard surface → EUV-compatible surface
• Reflective → non-reflective, minimized stray light
• Limited sliding capability → maximum sliding performance & reduced wear
• Basic protection → chemical & corrosive resistance
• One-size-fits-all → cost-optimized, application-specific performance

Special surfaces are often required for UV / DUV / EUV applications (X-ray or gamma applications on request).

Yes, linear stages can also be used as lifting stages (Z direction) and stacked (XY motions).

In this case, it is important that the maximum force in the drive direction is not exceeded. The force for vertical positioning is specified for linear stages under Fx in the specifications.

The selection is primarily based on force requirements, dynamics, and required precision. Additional relevant factors include installation space, energy efficiency, thermal boundary conditions, and integration effort. Depending on the application, different drive systems can be used. These are identifiable by abbreviations in the respective product designation:

• Ground ball screws or lead screws with SM motor (stepper motor), DC motor (brushed DC motor), or AC servo (AC servo motor)
• Electrodynamic linear motors (ironless or iron-core)
• Piezo motors such as Piezo-Legs^® or Nanomotion^®

Systematic Decision Structure

1. Stepper Motor

Typical Application

Simple positioning tasks with moderate speeds and forces.

Advantages

• Cost-effective
• Simple control (often without complex feedback control)
• High holding torque at standstill

Disadvantages

• Step loss under overload (without feedback)
• Reduced smoothness at low speeds

Recommended for

• Standard axes
• Laboratory automation
• Simple adjustment tasks
• Alignment units with low dynamic requirements
• Vacuum applications

2. DC Servo or BLDC Motor

Typical Application

Dynamic positioning with closed-loop control and encoder feedback.

Advantages

• Very smooth operation
• High speed and acceleration
• Precise control through feedback

Disadvantages

• Higher system cost
• Requires servo drive and parameterization

Recommended for

• High-speed XY tables
• Scanning axes
• Automation systems with position and velocity control
• Multi-axis systems with synchronization

3. Linear Motor

Typical Application

Direct drive without mechanical transmission for maximum dynamics.

Advantages

• No backlash, no mechanical wear
• Extremely smooth motion
• Very high accelerations

Disadvantages

• Higher investment cost
• Increased energy consumption
• Thermal management required

Recommended for

• High-dynamic systems in semiconductor manufacturing
• Inspection and metrology systems
• Precision assembly
• Applications with high cycle rates

4. Piezo, Nanomotion or Ultrasonic Motor

Typical Application

Nanometer-level motion or highly compact precision systems.

Advantages

• No magnetic fields
• Extremely fine step resolution
• High holding force without power consumption

Disadvantages

• Limited travel range
• Low to moderate speed
• Not designed for high continuous loads

Recommended for

• Nanopositioning systems
• Optical alignment and fine adjustment
• Microscopy and laser alignment
• Vacuum or magnetically sensitive applications
• Compact systems with minimal installation space

Incremental scales made of steel or Zerodur^® or Zeromet^® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

Steinmeyer offers standard motion controllers, PLC integration, and custom embedded solutions. Depending on the application, the control system can be fully integrated into the positioning system.

Overview Motion Controllers & Control Concepts

System Architecture – Modular Design

Control solutions are selected application-specifically and matched to the drive system, measurement system, and environmental conditions.

Standard Motion Controllers

• For single-axis or multi-axis systems
• Configurable control loops (position / velocity / torque)
• Fieldbus interfaces (e.g., EtherCAT, PROFINET)
• Fast commissioning

Typical application: Precision axes with linear motors, torque motors, or ball screws.

PLC Integration

• Integration into existing machine control systems
• Centralized system logic via customer PLC
• Reduced integration effort
• Standardized industrial communication

Typical application: OEM machines, scalable production systems, and retrofit projects.

Custom Embedded Solutions

• Compact, application-optimized controllers
• Integrated power stages
• Minimized installation space
• Optimized for process-specific applications

Typical application: Highly integrated positioning systems with limited installation space or special environmental requirements.