Linear Axes

Our linear axes are universal in use and can be integrated easily in the setup of various applications.

Motors
Feedback

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090…

High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to…

High performance stage (linear motor), travel 250 - 750 mm, rep ± 0.4 µm, load 4.5 kg, speed 1500…

Focus axis (ball screw), travel 25 - 50 mm, rep ± 0.5 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s

Focus axis (ball screw), travel 25 - 50 mm, rep ± 1.6 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s

Angepasstes System für Ihr Gesamtkonzept

Your customized system

Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 


Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail

Our references