Highly stable non-contact optical measurement.

This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer under inspection to the microscope with high precision and enables stable and high-resolution imaging. Its concept with internal motors, cross roller guides and high-precision ball screws enables outstanding precision with optimum use of the installation space. 

 

High-precision analysis of the smallest details 

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Inspection and microscopy of wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, surface inspection, examination of deposits, scratches, irregularities on the surface