KT470-DC
XY Stages

Flat precision XY stage with 300 mm travel, 0.5 µm repeatability, 23 kg load

High loads with long travels

The KT470 XY stage with DC-Motor is used in surface inspection. Low run-off with regard to straightness and flatness can be achieved by using cross rollers. This leads to an above-average repeatability, which is the basis for good compensation. This enables an extremely high accuracy for measuring applications.

Positioning of loads up to 230 N with an economical drive

High speeds up to 100 mm/s

Very high reliability with minimal frictional resistance by using of lapped cross roller bearings

Options:

Available with DC or stepper motor
High-resolution measuring system
Configuration for cleanroom, laboratory or production
Customized development with 3D design, prototypes, series production

Cost-optimized and reliable positioning

Depending on customer requirements, the XY system is equipped with a stepper motor or DC motor. The DC motor is the first choice for applications with high speeds and low torques. If, on the other hand, the positioning task requires low power and low speeds, the stepper motor is the appropriate variant.

Fields of application

Fast scanning applications and dynamic web travel e.g. semiconductor inspection, wafer inspection, chip testing, metrology systems, automatic optical inspection (AOI), measuring instruments, metrology, inspection systems, tool measurement

Specifications

KT470		-300-DC-L	-300-DC-R
Travel	[mm]	300 x 300	300 x 300
Repeatability unidirectional	[μm]	± 0.5	± 3
Repeatability bidirectional	[μm]	± 0.7	± 4
Accuracy	[μm]	± 3.6	± 19.7
Flatness	[μm]	± 7.5	± 7.5
Straightness	[μm]	± 3	± 3
Positioning speed	[mm/s]	50	50
Max. speed	[mm/s]	100	100
Max. acceleration	[m/s²]	1	1
Max. load Fx	[N]	45	45
Max. load Fy	[N]	45	45
Max. load Fz	[N]	230	230
Max. torque Mx	[Nm]	11	11
Max. torque My	[Nm]	11	11
Max. torque Mz	[Nm]	10	10
Pitch	[µrad]	± 170	± 170
Yaw	[µrad]	± 85	± 85
Length	[mm]	470	470
Width	[mm]	470	470
Height	[mm]	80	80
Weight	[kg]	38
Bearing		Cross Roller Bearings
Drive		Ball Screw 1214.511/1.12.361.412 P5P / 225177
Motor		DC-Motor
Feedback		Linear Scale	Motor Encoder
Material		Anodized Aluminum
Optional features		available with high-resolution measuring system, nut decoupling, brake, anti-cage creep technology, custom adapter, bore grid, cable / plugs
Variants cleanroom		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic
Variants vacuum		up to 10E-11 mbar (higher in request)

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KT470-300-DC_SM_xy-stage-step-file.zip

STM_KT470-DC-SM_xy-stage_interface.PDF

STM_KT470-300-DC-R-L_XY-stage_data-sheet.pdf

Solutions with KT470-DC

Customize system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10^-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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