PLT165-DLM
Linear Stages
Industrial positioning stage with a width of 165 mm. Driven by a direct linear motor.
Robust precision stage
The drive concept of this linear stage is based on a linear motor, thus allowing high acceleration and speed. This makes the linear stage ideal for horizontal applications where these characteristics are required.
Made for industrial applications
With a width of 165 mm, the PLT165 is the narrowest in its series. It is used as a single axis or as the top axis in multi-axis systems. The protect housing and metal strip cover design ensure protection against dust and particles in industrial environments.
Versatile fields of application
The PLT165 with dynamic linear motor is suitable for all areas of industry in which the precise adjustment of probes, sensors or optics is required - such as, for example, lacer machining, semiconductor technology or measurement egineering.
| Modell PLT165 | -200-DLM-L | -300-DLM-L | -400-DLM-L | -500-DLM-L | -750-DLM-L | |
| Travel | [mm] | 200 | 300 | 400 | 500 | 750 |
| Repeatability unidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
| Repeatability bidirectional | [μm] | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 |
| Accuracy | [μm] | ± 1.5 | ± 1.8 | ± 2 | ± 2.2 | ± 2.8 |
| Flatness | [μm] | ± 6 | ± 9 | ± 12 | ± 15 | ± 25 |
| Straightness | [μm] | ± 3 | ± 4.5 | ± 6 | ± 7.5 | ± 11 |
| Positioning speed | [mm/s] | 470 | 530 | 580 | 630 | 770 |
| Max. acceleration | [m/s2] | 9.5 | 11 | 12 | 13 | 15 |
| Max. load Fx | [N] | 60 | 60 | 60 | 60 | 60 |
| Max. load Fy | [N] | 520 | 520 | 520 | 520 | 520 |
| Max. load Fz | [N] | 520 | 520 | 520 | 520 | 520 |
| Max. torque Mx | [Nm] | 13 | 13 | 13 | 13 | 13 |
| Max. torque My | [Nm] | 19 | 19 | 19 | 19 | 19 |
| Max. torque Mz | [Nm] | 25 | 25 | 25 | 25 | 25 |
| Pitch | [µrad] | ± 30 | ± 35 | ± 40 | ± 45 | ± 55 |
| Yaw | [µrad] | ± 14 | ± 17 | ± 20 | ± 20 | ± 25 |
| Resolution | [µm] | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| L1 | [mm] | 500 | 600 | 700 | 800 | 1050 |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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