XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi belt, DC Motor | Travel 300 x 300 mm x 360°
Combinations of industrial axes

782300:189.26

Precise and highly dynamic for samples up to 150 mm / 6"

The XY Phi positioning system consists of two PLT165 linear stages (X and Y axes) and a DT200 rotary stage (Phi axis). The dust and particle protection in industrial environments is ensured by the protected housing and metal strip cover.

Ideal for flexible set-up and expansion of cleanroom systems

High accuracy up to 0.4 µm / 0. 004°

High accelerations and speeds up to 1000 mm/s

Outstanding low heat emission at frequent start and stop phases

Designed for maintenance-free 24/7 operation in clean room environments

Options:

Various, high-resolution measuring systems
Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests

Fields of application

Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology

Specifications

782300:189.26		X	Y	Rz
Standard System		PLT165-300-DLM	PLT165-300-DLM	DT200-DC-R
Travel	[mm; deg]	300	300	n x 360
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.004
Repeatability bidirectional	[µm; deg]	± 0.5	± 0.5	± 0.007
Positioning speed	[mm/s; deg/s]	500	500	35
Max. speed	[mm/s; deg/s]	1000	1000	70
Max. load	[N]	60	60	68
Weight	[kg]	40
Length x width x height	[mm]	600 x 690 x 205
Aperture diameter	[mm]	66
Max. sample diameter		150 mm / 6" (optional larger as special version)
Guide		Profile Rail	Profile Rail
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	DC Motor
Feedback		Linear Scale	Linear Scale	Motor-Encoder
Optional features		angular scale, adaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic