KDT180-PM
XY Stages
High precise with 100 mm travel, aperture 115 mm, 0.3 µm repeatability, 5 kg load
High precision XY stage with aperture
Equipped with piezo motors, the KDT180 is impressive with the smallest increments and high
resolution. The XY stage achieves high speed at the same time as high positioning
resolution. This XY system is also available as a high vacuum, ultra-high vacuum and non-magnetic version for demanding ambient conditions.Suitable for demanding environments
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Fields of application
High
resolution applications in microscopy, super
resolution microscopy, scanning microscopy, 3D imaging, screening, vacuum chambers, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing, research, experimental physics, electronics assembly, optics positioning, sample positioningModell KDT180-PM | -100-PM | |
Travel | [mm] | 100 |
Repeatability unidirectional | [μm] | ± 0.3 |
Repeatability bidirectional | [μm] | ± 0.4 |
Accuracy | [μm] | ± 8 |
Flatness | [μm] | ± 10 |
Straightness | [μm] | ± 7.5 |
Positioning speed | [mm/s] | 5 |
Max. speed | [mm/s] | 7 |
Max. acceleration | [m/s2] | 0.1 |
Max. load Fx | [N] | 10 |
Max. load Fy | [N] | 10 |
Max. load Fz | [N] | 55 |
Max. torque Mx | [Nm] | 0.9 |
Max. torque My | [Nm] | 0.9 |
Max. torque Mz | [Nm] | 0.7 |
Pitch | [µrad] | ± 250 |
Yaw | [µrad] | ± 150 |
Weight | [kg] | 3 |
Length | [mm] | 230 |
Width | [mm] | 230 |
Height | [mm] | 50 |
Aperture | [mm] | 115 x 115 |
Motor | Piezo Motor | |
Feedback | Linearmesssystem, Linear Scale |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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