KDT310-DC
XY Stages
Microscopy stage with 100 mm travel, aperture 150 mm, 0.5 µm repeatability, 7 kg load
Scanning stage with large aperture
The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime.
Designed for microscopy tasks
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Fields of application
High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing
| Modell KDT310 | -100-DC-R | -100-DC-L | |
| Travel | [mm] | 100 | 100 |
| Repeatability unidirectional | [μm] | ± 1.5 | ± 0.5 |
| Repeatability bidirectional | [μm] | ± 2 | ± 0.7 |
| Accuracy | [μm] | ± 18 | ± 6.1 |
| Flatness | [μm] | ± 7 | ± 7 |
| Straightness | [μm] | ± 5 | ± 5 |
| Positioning speed | [mm/s] | 30 | 30 |
| Max. acceleration | [m/s2] | 0.5 | 0.5 |
| Max. load Fx | [N] | 45 | 45 |
| Max. load Fy | [N] | 45 | 45 |
| Max. load Fz | [N] | 70 | 70 |
| Max. torque Mx | [Nm] | 6.1 | 6.1 |
| Max. torque My | [Nm] | 6.1 | 6.1 |
| Max. torque Mz | [Nm] | 5.6 | 5.6 |
| Pitch | [µrad] | ± 150 | ± 150 |
| Yaw | [µrad] | ± 100 | ± 100 |
| Weight | [kg] | 13 | 13 |
| Length | [mm] | 310 | 310 |
| Width | [mm] | 310 | 310 |
| Height | [mm] | 80 | 80 |
| Aperture | [mm] | 150 | 150 |
| Motor | DC-Motor | DC-Motor | |
| Feedback | Motor-Encoder | Linearmesssystem, Linear Scale |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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