KT510-SM
XY Stages

Precision XY stage with 200 mm travel, 1.3 µm repeatability, 30 kg load for variable and moving objects

High precise even under variable load conditions

This XY positioning system was developed especially for measurement applications where

yaw errors are disturbing. Even the smallest

yaw errors can be minimized to 25 µrad over the entire travels of 200 mm. With short measuring paths of 10 mm, these can even be reduced by a factor of 5. Even with variable loads up to 30 kg, the cross table allows high-precision measurements by the robust plate design. The XY stage is driven by a motor-spindle combination consisting of a 2-phase stepper motor and a Steinmeyer ball screw with 1 mm pitch.

Ideal for demanding measurement applications

High-precision positioning of variable loads up to 30 kg

Drastic reduction of measurement errors to 25 µrad (200 mm travel), with shorter travel distances up to 5 µrad (10 mm)

Perfect straightness and flatness with ± 1

Fields of application

metrology, surface inspection, inspection systems, tool measurement

Specifications

Modell KT510-SM		-200-SM
Travel	[mm]	200
Repeatability unidirectional	[μm]	± 1.3
Repeatability bidirectional	[μm]	± 1.8
Accuracy	[μm]	± 11.2
Flatness	[μm]	± 1
Straightness	[μm]	± 1
Positioning speed	[mm/s]	20
Max. speed	[mm/s]	40
Max. acceleration	[m/s²]	0.4
Max. load Fx	[N]	45
Max. load Fy	[N]	45
Max. load Fz	[N]	300
Max. torque Mx	[Nm]	40
Max. torque My	[Nm]	40
Max. torque Mz	[Nm]	40
Pitch	[µrad]	± 25
Yaw	[µrad]	± 25
Length	[mm]	510
Width	[mm]	510
Height	[mm]	125
Motor		Schrittmotor, Stepper Motor
Feedback		Open Loop

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KT510-200-SM-xy_stage_data-sheet.pdf

STM_KT510-200_xy-stage_interface.pdf

STM_KT510-200_xy-stage_3D-pdf.PDF

STM_KT510-200_xy-stage_step-file.zip

STM_KT510-200_xy-stage_igs-file.zip

Customize system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10^-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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