KLT310-DC
XY Stages
Heavy-load XY stage with 100 mm travel, 0.3 µm repeatability, 280 N load
High precision XY stage with high load rating
The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads.
The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering.
Ideal for demanding measurement applications
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Fields of application
Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy
Modell KLT310 | -100-DC-R | -100-DC-L | |
Travel | [mm] | 100 | 100 |
Repeatability unidirectional | [μm] | ± 1.5 | ± 0.3 |
Repeatability bidirectional | [μm] | ± 2 | ± 0.5 |
Accuracy | [μm] | ± 10 | ± 1 |
Flatness | [μm] | ± 4 | ± 4 |
Straightness | [μm] | ± 3 | ± 3 |
Positioning speed | [mm/s] | 30 | 30 |
Max. acceleration | [m/s2] | 0.5 | 0.5 |
Max. load Fx | [N] | 45 | 45 |
Max. load Fy | [N] | 45 | 45 |
Max. load Fz | [N] | 280 | 280 |
Max. torque Mx | [Nm] | 6.1 | 6.1 |
Max. torque My | [Nm] | 6.1 | 6.1 |
Max. torque Mz | [Nm] | 5.6 | 5.6 |
Pitch | [µrad] | ± 150 | ± 150 |
Yaw | [µrad] | ± 100 | ± 100 |
Length | [mm] | 310 | 310 |
Width | [mm] | 310 | 310 |
Height | [mm] | 80 | 80 |
Motor | DC-Motor | ||
Feedback | Motor-Encoder |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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