KLT310-SM
XY Stages

Heavy-load XY stage with 100 mm travel, 1.6 µm repeatability, 280 N load
KLT310-SM

High precision XY stage with high load rating

The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads.
The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering.

 

Ideal for demanding measurement applications

  • High-precision positioning of loads up to 280 N
  • Accuracy values up to 1.6 µm due to high-precision spindle axes
  • Optional with stepper motor, DC motor and in different
    measuring system resolutions
  • Vacuum version available

Fields of application

Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

 

Modell KLT310-100-SM
Travel [mm] 100
Repeatability unidirectional [μm]± 1.6
Repeatability bidirectional [μm]± 2.1
Accuracy [μm]± 10
Flatness [μm]± 4
Straightness [μm]± 3
Positioning speed [mm/s]10
Max. acceleration [m/s2]0.2
Max. load Fx[N]45
Max. load Fy[N]45
Max. load Fz[N]280
Max. torque Mx[Nm]6.1
Max. torque My[Nm]6.1
Max. torque Mz[Nm]5.6
Pitch [µrad]± 150
Yaw [µrad]± 100
MotorSchrittmotor, Stepper Motor
FeedbackOpen Loop


Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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