KDT310-SM
XY Stages

Microscopy stage with 100 mm travel, aperture 150 mm, 1.6 µm repeatability, 70 N load
KDT310-SM

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime.

 

Designed for microscopy tasks

  • Ideal for microscopy, optical inspection systems and laser processing
  • High-precision repeatability up to 1.6 µm
  • Good price-performance ratio and very long life cycle
  • Optional as DC-Motor version or with 50 mm travel (KDT235) available

Fields of application

High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

 

Modell KDT310-100-SM
Travel [mm] 100
Repeatability unidirectional [μm]± 1.6
Repeatability bidirectional [μm]± 2.1
Accuracy [μm]± 18.1
Flatness [μm]± 7
Straightness [μm]± 5
Positioning speed [mm/s]10
Max. acceleration [m/s2]0.2
Max. load Fx [N]45
Max. load Fy [N]45
Max. load Fz [N]70
Max. torque Mx [Nm]6.1
Max. torque My [Nm]6.1
Max. torque Mz [Nm]5.6
Pitch [µrad]± 150
Yaw [µrad]± 100
Weight [kg]13
Length [mm]310
Width [mm]310
Height [mm]80
Aperture [mm]150
MotorSchrittmotor, Stepper Motor
FeedbackOpen Loop

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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