KDT180-SM
XY Stages
Precise XY stage with 60 mm travel, 90 mm aperture, 2.3 µm repeatability, 6 kg load
Symmetrical XY stage in plate architecture with aperture
The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications.
Compact and flat with large aperture
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Fields of application
Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment
| Modell KDT180-SM | -50-SM | |
| Travel | [mm] | 50 |
| Repeatability unidirectional | [μm] | ± 2.3 |
| Repeatability bidirectional | [μm] | ± 3.3 |
| Accuracy | [μm] | ± 14.3 |
| Flatness | [μm] | ± 4.8 |
| Straightness | [μm] | ± 3.6 |
| Positioning speed | [mm/s] | 1.4 |
| Max. speed | [mm/s] | 3 |
| Max. acceleration | [m/s2] | 0.4 |
| Max. load Fx | [N] | 5.3 |
| Max. load Fy | [N] | 5.3 |
| Max. load Fz | [N] | 55 |
| Max. torque Mx | [Nm] | 0.9 |
| Max. torque My | [Nm] | 0.9 |
| Max. torque Mz | [Nm] | 0.7 |
| Pitch | [µrad] | ± 120 |
| Yaw | [µrad] | ± 75 |
| Weight | [kg] | 2.5 |
| Length | [mm] | 180 |
| Width | [mm] | 180 |
| Height | [mm] | 38 |
| Aperture | [mm] | 90 x 90 |
| Motor | Stepper Motor | |
| Feedback | Open Loop |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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