KT180-SM
XY Stages

Flat precision XY stage with 50 mm travel, 1.2 µm repeatability, 6 kg load
KT180-SM

Ultra flat XY stage

The KT180 is a universally usable XY stage that is characterized by extremely flat design. Because of the corss roller bearings used, it achieves outstanding operational parameters which are critical for applications in measurement engineering. The XY stage design forms the basis of the internal motors concept.

Specially for measuring applications

  • Ideal for inspection systems, microscopy and measuring systems
  • High-precision repeatability up to 1.2 µm
  • Optional with DC motor or stepper motor

Fields of application

Applications in microscopy, metrology, inspection systems, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measurement devices.

 

Modell KT180-50-SM
Travel [mm] 50
Repeatability unidirectional [μm]± 1.2
Repeatability bidirectional [μm]± 1.7
Accuracy [μm]± 5.6
Flatness [μm]± 4
Straightness [μm]± 3
Positioning speed [mm/s]1.4
Max. speed [mm/s]3
Max. acceleration [m/s2]0.03
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]60
Max. torque Mx [Nm]1.3
Max. torque My [Nm]1.3
Max. torque Mz [Nm]1.4
Pitch [µrad]± 70
Yaw [µrad]± 35
Weight [kg]3
Length [mm]180
Width [mm]180
MotorSchrittmotor, Stepper Motor
FeedbackOpen Loop

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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