KDT600-EDLM
XY Stages

Precision XY stage with 385 mm travel, aperture 400 mm, 0.3 µm repeatability, 22 kg load
KDT600-EDLM

Scanning stage with large aperture

This large precision xy stage is designed for maximum

repeatability.

Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for

air bearing systems.Polished cross roller guides are used for

repeatability of straightness and flatness of + -0.15 µm. With the large transmitted light, large substrates can also be measured from both sides or with fluoroscopy. It also offers the option of differential measurement to take advantage of full sensor accuracy in measurement applications. Even when the stage is fully moved, an opening of at least 60mm x 60mm is always kept.

Fastest scanning applications with high acceleration

  • Extremely fast scan results by a positioning speed of 330 mm/s
  • Scan high loads with an extreme resolution of 0.05 µm
  • Cost-optimized to achieve the comparable performance of air bearing systems
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
  • Life expectancy up to two million full strokes
  • integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems

 

Modell KDT600-EDLM-385-EDLM
Travel [mm] 385
Repeatability unidirectional [μm]± 0.3
Repeatability bidirectional [μm]± 0.4
Accuracy [μm]± 16.6
Flatness [μm]± 10
Straightness [μm]± 1.7
Positioning speed [mm/s]330
Max. speed [mm/s]500
Max. acceleration [m/s2]3
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]230
Max. torque Mx [Nm]11
Max. torque My [Nm]11
Max. torque Mz [Nm]10
Pitch [µrad]± 280
Yaw [µrad]± 45
Length [mm]600
Width [mm]600
Height [mm]120
Aperture [mm]400
MotorDynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
FeedbackLinearmesssystem, Linear Scale

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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