KDT380-DC
XY Stages
Heavy duty stage with up to 155 mm travel, aperture 170 mm, 0.5 µm repeatability, 20 kg load
Precision aperture stage for heavy loads
The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time.
Highly compact for a wide range of inspection tasks
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Options:
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Fields of application
metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement
| Modell KDT380 | -155-DC-R | -155-DC-L | -155-SM | |
| Travel | [mm] | 155 | 155 | 155 |
| Repeatability unidirectional | [µm] | ± 2 | ± 0.5 | ± 1.6 |
| Repeatability bidirectional | [µm] | ± 2.5 | ± 0.7 | ± 2.1 |
| Accuracy | [µm] | ± 13.5 | ± 3.5 | ± 13.2 |
| Flatness | [µm] | ± 11 | ± 11 | ± 11 |
| Straightness | [µm] | ± 3.9 | ± 3.9 | ± 3.9 |
| Positioning speed | [mm/s] | 35 | 35 | 13 |
| Max. speed | [mm/s] | 50 | 50 | 20 |
| Max. acceleration | [m/s2] | 0.5 | 0.5 | 0.2 |
| Max. load Fx | [N] | 45 | 45 | 45 |
| Max. load Fy | [N] | 45 | 45 | 45 |
| Max. load Fz | [N] | 110 | 110 | 110 |
| Max. torque Mx | [Nm] | 5.3 | 5.3 | 5.3 |
| Max. torque My | [Nm] | 5.3 | 5.3 | 5.3 |
| Max. torque Mz | [Nm] | 5.1 | 5.1 | 5.1 |
| Pitch | [µrad] | ± 190 | ± 190 | ± 190 |
| Yaw | [µrad] | ± 120 | ± 120 | ± 120 |
| Wight | [kg] | 30 | 30 | 30 |
| Length | [mm] | 380 | 380 | 380 |
| Width | [mm] | 380 | 380 | 380 |
| Heigt | [mm] | 100 | 100 | 100 |
| Aperture | [mm] | 170 x 170 | 170 x 170 | 170 x 170 |
| Motor | DC-Motor | DC-Motor | Stepper Motor | |
| Feedback | Motor-Encoder | Linear Scale | Open Loop |
FMC 220
Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously
FMC400/450
Multi-axis controller fully ready for tracking, simple creation of own programs.
ACS
We support integration of our systems into your ACS environment
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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