KDT380-DC
XY Stages
Heavy duty stage with up to 155 mm travel, aperture 170 mm, 0.5 µm repeatability, 20 kg load
Precision aperture stage for heavy loads
The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a backlash-free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time.
Highly compact for a wide range of inspection tasks
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Options:
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Fields of application
metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement
| Modell KDT380 | -155-DC-R | -155-DC-L | -155-SM | |
| Travel | [mm] | 155 | 155 | 155 |
| Repeatability unidirectional | [µm] | ± 2 | ± 0.5 | ± 1.6 |
| Repeatability bidirectional | [µm] | ± 2.5 | ± 0.7 | ± 2.1 |
| Accuracy | [µm] | ± 13.5 | ± 3.5 | ± 13.2 |
| Flatness | [µm] | ± 11 | ± 11 | ± 11 |
| Straightness | [µm] | ± 3.9 | ± 3.9 | ± 3.9 |
| Positioning speed | [mm/s] | 35 | 35 | 13 |
| Max. speed | [mm/s] | 50 | 50 | 20 |
| Max. acceleration | [m/s2] | 0.5 | 0.5 | 0.2 |
| Max. load Fx | [N] | 45 | 45 | 45 |
| Max. load Fy | [N] | 45 | 45 | 45 |
| Max. load Fz | [N] | 110 | 110 | 110 |
| Max. torque Mx | [Nm] | 5.3 | 5.3 | 5.3 |
| Max. torque My | [Nm] | 5.3 | 5.3 | 5.3 |
| Max. torque Mz | [Nm] | 5.1 | 5.1 | 5.1 |
| Pitch | [µrad] | ± 190 | ± 190 | ± 190 |
| Yaw | [µrad] | ± 120 | ± 120 | ± 120 |
| Wight | [kg] | 30 | 30 | 30 |
| Length | [mm] | 380 | 380 | 380 |
| Width | [mm] | 380 | 380 | 380 |
| Heigt | [mm] | 100 | 100 | 100 |
| Aperture | [mm] | 170 x 170 | 170 x 170 | 170 x 170 |
| Motor | DC-Motor | DC-Motor | Stepper Motor | |
| Feedback | Motor-Encoder | Linear Scale | Open Loop |
