KT600-EDLM
XY Stages
Precision XY stage with 450 mm travel, 0.2 µm repeatability, 30 kg load
Precision giant with the highest repeatability
This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.
Fastest scanning applications with high acceleration
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Fields of application
Fast scanning applications and dynamic web
travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for
air bearing systemsModell KT600 | -450-EDLM-L | |
Travel | [mm] | 450 |
Repeatability unidirectional | [μm] | ± 0.2 |
Repeatability bidirectional | [μm] | ± 0.3 |
Accuracy | [μm] | ± 4.8 |
Flatness | [μm] | ± 13 |
Straightness | [μm] | ± 2.5 |
Positioning speed | [mm/s] | 330 |
Max. speed | [mm/s] | 500 |
Max. acceleration | [m/s2] | 3 |
Max. load Fx | [N] | 25 |
Max. load Fy | [N] | 25 |
Max. load Fz | [N] | 300 |
Max. torque Mx | [Nm] | 32 |
Max. torque My | [Nm] | 32 |
Max. torque Mz | [Nm] | 30 |
Pitch | [µrad] | ± 110 |
Yaw | [µrad] | ± 110 |
Length | [mm] | 600 |
Width | [mm] | 600 |
Height | [mm] | 110 |
Motor | Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor | |
Feedback | Linearmesssystem, Linear Scale |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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