Miniature Linear stages

Linear Stage 95 x 95 x 40 mm, Travel up to 40 mm, Rep 1.5 µm, Load 6 kg, Speed 2 mm/s

Compact positioner with internal motor

Thanks to its cross roller bearings, the MT95 miniature linear stage provides excellent straightness and flatness. The drive is redirected with a toothed belt transmission and could thus be completely accommodated in the axis.

  • Ideal for small installation spaces (95 x 95 x 40 mm)
  • Repeatability up to ± 1.5 µm
  • Easily stackable to compact multi-axis systems
  • Available with DC motor or stepper motor
  • 3-axis compact unit: MP95-3
  • Version for clean room and vacuum on request

Fields of application

Positioning in small spaces e.g. incubators, fiber positioning, camera and microscope positioners, aligners for vacuum chambers, setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer prober alignment


MT95 -40-DC-R 
Repeatability unidirectional[μm]± 1.5 
Repeatability bidirectional[μm]± 3.5 
Accuracy[μm]± 4.8 
Flatness[μm]± 2 
Straightness[μm]± 1.4 
Positioning speed[mm/s]1.1
Max. speed[mm/s]2.2
Max. acceleration[m/s2]0.02 
Max. load Fx[N]30
Max. load Fy[N]65
Max. load Fz[N]65
Max. torque Mx[Nm]3.2
Max. torque My[Nm]1.3
Max. torque Mz[Nm]1.1
Pitch[µrad]± 65
Yaw[µrad]± 40
Screw typeBall Screw 1112.513/ P5P
Screw lead1
Bearing Cross Roller Bearings
Motor DC-Motor
Feedback Motor-Encoder
Material Anodized Aluminum
Optional featuresHigh-resolution measuring system, DC or Stepper Motor, combination to a XYZ-R system, custom adapter, bore grid, cable / plugs
Variants clean room up to clean room class ISO 5 (higher on request)
Variants beamUV, DUV (EUV, X-ray, gamma on request)
Variants Magnetismon request
Variants vacuum on request

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85

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Consulting, Project Management & Engineering

T +49 (0) 351 88585-67

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