MT53-PM
Miniature Linear stages
Micro stage with cross roller bearings and piezo motor for steps in nanometer range.
High-resolution micro stage
The smallest stage in the Steinmeyer Mechatronik product range offers very high resolution. Thanks to its miniaturized design, it is ideal for applications where space requirements are limited and which demand high standards.
Optimal step sizes thanks to the piezo motor
The MT53 is equipped with cross roller bearings and a piezo motor, allowing steps in the nanometer range. In the vacuum and non-magnetic version, this micro stage is perfectly suitable for use in demanding environments.
Ideal for micromachining and micro assembly
The MT53 can be in demanding micromachining and micro assembly applications. It can also be ideally deployed in research and development applications or in the semiconductor industry.
| Modell MT53 | -10-PM- L | |
| Travel | [mm] | 10 |
| Repeatability unidirectional | [μm] | ± 0.2 |
| Repeatability bidirectional | [μm] | ± 0.3 |
| Accuracy | [μm] | ± 0.8 |
| Flatness | [μm] | ± 0.5 |
| Straightness | [μm] | ± 0.4 |
| Positioning speed | [mm/s] | 5 |
| Max. acceleration | [m/s2] | 0.1 |
| Max. load Fx | [N] | 5 |
| Max. load Fy | [N] | 8.8 |
| Max. load Fz | [N] | 8.8 |
| Max. torque Mx | [Nm] | 0.2 |
| Max. torque My | [Nm] | 0.09 |
| Max. torque Mz | [Nm] | 0.07 |
| Pitch | [µrad] | ± 30 |
| Yaw | [µrad] | ± 19 |
| Resolution | [µm] | 0.1 |
| Weight | [kg] | 0.1 |
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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