Miniature XYZ Stage MP53-3
XYZ Positioning Stages – compact stacked

782325:040.26 (782325:110.24)
Miniature XYZ Stage MP53-3 - XYZ Positioning Stages – compact stacked

 

High-resolution micropositioner

The MP53 positioning system is a miniaturized 3-axis system for X, Y and Z motions with travel ranges of 10 mm. The aligner is designed with piezo motors and enables positioning increments up to a few nanometres. The repeatability of +- 0.005 µm can be ensured with the linear scale.  
 

  • Ideal for compact applications
  • Resolutions in the submicrometer range
  • Load capacity up to 5 N
  • Reliable and consistent quality by highly precise positioning

Optionally expandable:

  • Optionally with high-resolution measuring system for repeat accuracies up to 0.005 µm
  • Combinable with rotary stages for rotational applications
  • Variants for vacuum up to 10-11 mbar or clean room ISO 14644-1 class 6 (up to class 1 on request)
  • Available as magnetic, low-magnetic and magnet-free version
  • Ready-to-use with preconfigured motion controller including sample software


Fields of application

Precision positioning in the smallest dimensions for laboratory applications, microscopy and semiconductor technology, sample preparation, sample scanning, camera alignment, sensor alignment, material research, material analysis

 

MP53-3   X Y Z
Standard System   MT53 MT53 MT53
Travel Range [mm] 10 10 10
Repeatability (unidirectional) [µm] ± 0.2 ± 0.2 ± 0.2
Repeatability (bidirectional) [µm] ± 0.3 ± 0.3 ± 0.3
Positioning Speed [mm/s] 5 5 5
Max. Speed [mm/s] 7.5 7.5 7.5
Max. Load [N] 5 5 5
Length x Width x Height [mm] 86 x 53 x 59
Motor   Piezo Motor Piezo Motor Piezo Motor
Guide   Cross roller Cross roller Cross roller
Feedback   Linear measurement system Linear measurement system Linear measurement system
Resolution measuring system   0.1 µm, optionally up to 0.005 µm or without measuring system
Optional Features   High-resolution measurement systems, combinable with rotary stages for additional rotational degrees of freedom, customer-specific development of the complete application including housing, purge air preparation, brake, customer-specific adapters, hole patterns, cables, and connectors
Cleanroom Variants   Up to cleanroom class ISO 6 (higher on request)
Radiation Variants   UV, DUV, EUV (X-ray, gamma on request)
Magnetism Variants   magnetic | low-magnetic | non-magnetic
Vacuum Variants   All ranges up to 10E-11 mbar HV / UHV

 

Used Standard Components

MT53-PM

Linear Stage 53 x 53 x 20 mm, Travel up to 10 mm, Rep ± 0.2 µm, Load 0.5 kg, Speed 10 mm/s

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