MT130-DC
Miniature Linear stages

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 0.7 µm, Load 9 kg, Speed 60 mm/s
MT130-DC

Compact linear stage with internal motor

The miniature linear stage provides excellent straightness and flatness thanks to backlash-free cross roller bearings. The drive is completely housed in the highly compact positioning system.

  • Travels up to 80 mm in small installation spaces (130 x 130 x 43 mm)
  • Repeatability up to 0.7 µm
  • Easily stackable to compact multi-axis systems

Options:

  • Available with DC motor or stepper motor
  • 3-axis compact unit: MP130-3
  • Combinable with DT130 rotary stage
  • Stainless steel option for increased rigidity
  • Version for clean room, vacuum and EUV 

Fields of application

Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment

 

Modell MT130 -50-DC-R-80-DC-R-50-DC-L-80-DC-L
Travel[mm]50805080
Repeatability unidirectional[µm]± 2.5± 2.5± 0.7± 0.7
Repeatability bidirectional[µm]± 4.5± 4.5± 1.2± 1.2
Accuracy[µm]± 8.3± 10± 2.3± 2.6
Flatness[µm]± 2.5± 4± 2.5± 4
Straightness[µm]± 1.8± 2.8± 1.8± 2.8
Positioning speed[mm/s]30303030
Max. speed[mm/s]60606060
Max. acceleration[m/s2]0.50.50.50.5
Max. load Fx[N]45454545
Max. load Fy[N]95959595
Max. load Fz[N]95959595
Max. torque Mx[Nm]4.64.64.64.6
Max. torque My[Nm]1.81.81.81.8
Max. torque Mz[Nm]1.61.61.61.6
Pitch[µrad]± 70± 90± 70± 90
Yaw[µrad]± 40± 55± 40± 55
Weight[kg]1.82.31.82.3
Length[mm]130130130130
Width[mm]130130130130
Height[mm]43434343
Motor DC-MotorDC-MotorDC-MotorDC-Motor
Feedback Motor-EncoderMotor-EncoderLinear ScaleLinear Scale


Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44
E-mail

 

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