X-Rz positioning system (cleanroom ISO 4) | X stepper motor, ball screw, motor encoder | Theta belt drive, angular scale | aperture 12" / 340 mm | travel 205 mm × 360°
XY Theta Stage
782426:009.26
Rotary Stage with Linear Motion and Large Transmission Aperture
The positioning system combines a precise rotary stage (Rz) with a linear X-axis for spiral or concentric scanning paths. It moves samples up to 12” / 340 mm for quality control in transmission-based inspection: The sample is continuously rotated while polarized infrared light passes through it.
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High-Speed Rotation, No Vibration Transfer via Belt Drive
The specially developed rotary stage enables vibration-free motion of the transmitted-light sample, ensuring precise and stable measurement results. A stage with belt drive is moved by a high-precision ball screw, allowing the entire sample surface — similar to a turntable — to be scanned in a spiral or concentric pattern. To achieve higher rotational speeds while maintaining smooth operation, stepper motor drives are operated in closed-loop mode with motor encoders. The result: precise, reproducible measurement results and significantly increased efficiency in wafer inspection or sensitive transmission, transillumination, and optical measurements of biological samples or cells.
Application Fields
Positioning system for wafer inspection, stress analysis in semiconductor materials, optical metrology, infrared transmission measurement, materials research, quality assurance in semiconductor production, positioning and rotation of transparent microfluidic chips for real-time inspection of flow and particle motion under IR or UV light, rotation and linear scanning of biological specimens under polarized light for detecting structural or stress variations in tissue samples (e.g. collagen fibers, keratin)
| 782426:009.26 | X | Rz | |
| Travel | [mm; deg] | 205 | n × 360 |
| Repeatability unidirectional | [µm; deg] | ± 4 | ± 0.5 |
| Repeatability bidirectional | [µm; deg] | ± 6 | ± 0.5 |
| Positioning speed | [mm/s; deg/s] | 50 | 12000 |
| Max. speed | [mm/s; deg/s] | 100 | 18000 |
| Max. load | [N] | 50 | |
| Weight | [kg] | 50 | |
| Dimensions (L × W × H) | [mm] | 748 × 496 × 530 | |
| Aperture | [Ø] | 340 mm | |
| Rotary plate | [Ø] | 500 mm | |
| Motor | Stepper motor | Stepper motor | |
| Drive | 1412.502/5.16.304.362 R / Art. no. 127283 | Round belt | |
| Spindle pitch | 5 | ||
| Feedback | Motor encoder | Motor encoder, angular scale | |
| Optional features | Z-axis extension, configuration for semiconductor, optics or life science applications, process integration, adapter plate, chuck, base plate (granite / aluminum), enclosure, safety concept and safety technology (emergency stop, door switches, light curtains, laser scanners, STO, SLS) | ||
| Cleanroom versions | up to cleanroom class ISO 4 (higher on request) | ||
| Beam variants | UV, DUV (EUV, X-ray, gamma on request) | ||
| Magnetism variants | magnetic (low magnetic on request) | ||
Used Standard Components
KGT 1412 / 1432
Related Products
Almost all atmospheric multi-axis combinations are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:
Overview Clean Room & Vacuum Stages Get in touch with our technical consultant
Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of custom axis combinations, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.
What surfaces are available?
Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).
Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:
- Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
- Electrodynamic linear motors (ironless or iron-core).
- Piezomotors such as Piezo-Legs® or Nanomotion®.
Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Katja Weißbach
Consulting
T +49 351 88585-64
E-Mail
Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail
Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
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