XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor
Gantries

782481:001.26
XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor - Gantries

 

Highly stable AFM air bearing gantry with large travel ranges

This very rigid XYZ gantry is specially designed for high-precision atomic force microscopy (AFM) examination of particularly large glass samples. Above the u-shaped sample platform is a movable cantilever in Z for the customized AFM.

The cantilever can be precisely aligned with the sample and moved to any point within the U-shape for surface relief acquisition. The air bearing provides excellent in-plane positioning accuracy. The maximum sample weight is 500 kg.

Atomic stability for demanding measurements

  • Ideal for highly rigid and precise measurements without the influence of vibration
  • High throughput due to travels of 150 x 275 x 50 mm, expandable to 550 x 1550 x 50 mm
  • Extreme stability at standstill of 5 nm and better
  • Outstanding long lifetime due to the use of wear-free air bearings
Optionally adaptable:

Nanosurf offers compact, mountable and customized AFM systems. More information is available hier.

    Maintenance-free and stable due to air bearing technology

    The crosshead moves on specially developed air bearings. It floats on an approx. 5 µm thick air gap and thus operates practically contact-free and wear-free. This guarantees a very long lifetime. With the aid of the air bearings, extreme rigidity can be achieved. As soon as the measuring head is brought into position, the air is released from the bearings and the system is fixed by its internal preload. Also, the entire mass of the transverse axis then rests directly on the base granite for maximum stability. Optionally, feet can be mounted under the granite as extra vibration dampers to further protect the system from building vibrations.

    Individual extensions and customizations

    Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

    Fields of application

    Positioning system Atomic Force Microscope, Surface analysis, Surface relief analysis, Wafer inspection, Material science

    References

    2020/10 Press release "Small all the way"

     

    782481:001.26 

     

    X

    Y

    Z

    Standard System

     

     

     

    MT130-SM

    Travel

    [mm]

    275

    150

    50

    Repeatability unidirectional

    [µm]

    ± 5.5

    ± 5.5

    ± 2.5

    Repeatability bidirectional

    [µm]

    ± 6.5

    ± 6.5

    ± 4.5

    Positioning speed

    [mm/ss]

    50

    50

    30

    Max. load

    [N]

     

     

    40

    Motor

     

    Stepper Motor

    Stepper Motor

    Stepper Motor

    Drive

     

     

    Ball ScrewBall ScrewBall Screw
    Feedback

     

     

    Open LoopOpen LoopOpen Loop

     

    Your customized system

    Are you looking for a technical solution for your application?

    Get your first 3D Design in a few days:

     

    Elger Matthes
    Development, Consulting, Concepts, Innovationn

    T +49 (0) 351 88585-0
    E-mail

    Nadine Strudel
    Consulting International

    T +49 (0) 351 88585-44
    E-mail

     

    Our references