LA340-EDLM
Linear Axes

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s

Highly dynamic linear stage with air bearing

The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.

Ideal for particle-free, highly dynamic applications with high precision

Perfect flatness and high repeatibility up to ± 0.3 µm

Highly dynamic at speeds of up to 2060 mm/s

High load up to 50 kg

Suitable for maintenance-free 3-shift operation in clean room

Options:

Travels from 500 - 2000 mm
Versions for clean room, laboratory or production
Optionally with base plate and frame
Different measuring system resolutions up to 0.001 µm
Customized development with 3D design, prototypes, large series production

Fields of application

linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation

Specifications

LA340-EDLM		-500-EDLM-L	-1000-EDLM-L	-1500-EDLM-L	-2000-EDLM-L
Travel	[mm]	500	1000	1500	2000
Repeatability unidirectional	[μm]	± 0.3	± 0.3	± 0.3	± 0.3
Repeatability bidirectional	[μm]	± 0.4	± 0.4	± 0.4	± 0.4
Accuracy	[μm]	± 1.9	± 3	± 4.1	± 5.2
Flatness	[μm]	± 0.8	± 1.5	± 2.3	± 3
Straightness	[μm]	± 0.8	± 1.5	± 2.3	± 3
Positioning speed	[mm/s]	790	1210	1630	2060
Max. speed	[mm/s]	1185	1815	2445	3090
Max. acceleration	[m/s2]	16	25	35	40
Max. load Fx	[N]	100	100	100	100
Max. load Fy	[N]	500	500	500	500
Max. load Fz	[N]	500	500	500	500
Max. torque Mx	[Nm]	30	30	30	30
Max. torque My	[Nm]	50	50	50	50
Max. torque Mz	[Nm]	30	30	30	30
Pitch	[µrad]	± 11	± 16	± 19	± 20
Yaw	[µrad]	± 11	± 16	± 19	± 20
Length	[mm]	1060	1560	2060	2560
Width	[mm]	379	379	379	379
Height	[mm]	310	310	310	310
Weight	[kg]	370
Weight with frame	[kg]	640
Bearing		Air Bearing
Type of drive system		Linear Motor
Motor		Ironless Dynamic Linear Motor
Feedback		Linear Scale
Measuring system resolutions		0.05 µm (optionally up to 0.001 µm)
Material		Anodized Aluminum, Granite
Optional features		Frame
Variants cleanroom		up to clean room class ISO 6 (higher on request)
Variants beam		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		on request
Variants vacuum		on request