Linear Axes

High-performance air bearing linear stage, travel 500 - 2000 mm, rep 0.3 µm, load 50 kg, speed 4120 mm/s

Highly dynamic linear stage with air bearing

The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.

  • Ideal for particle-free, highly dynamic applications with high precision
  • Perfect flatness and high repeatibility up to ± 0.3 µm
  • Highly dynamic at speeds of up to 2060 mm/s
  • High load up to 50 kg
  • Suitable for maintenance-free 3-shift operation in clean room


  • Travels from 500 - 2000 mm
  • Versions for clean room, laboratory or production
  • Optionally with base plate and frame
  • Different measuring system resolutions up to 0.001 µm
  • Customized development with 3D design, prototypes, large series production

Fields of application

linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation


LA340-EDLM | 782469:012.24-500-EDLM-L-1000-EDLM-L-1500-EDLM-L-2000-EDLM-L
Repeatability unidirectional[μm]± 0.3± 0.3± 0.3± 0.3
Repeatability bidirectional[μm]± 0.4± 0.4± 0.4± 0.4
Accuracy[μm]± 1.9± 3± 4.1± 5.2
Flatness[μm]± 0.8± 1.5± 2.3± 3
Straightness[μm]± 0.8± 1.5± 2.3± 3
Positioning speed[mm/s]790121016302060
Max. speed[mm/s]1580242032604120
Max. acceleration[m/s2]16253540
Max. load Fx[N]100100100100
Max. load Fy[N]500500500500
Max. load Fz[N]500500500500
Max. torque Mx[Nm]30303030
Max. torque My[Nm]50505050
Max. torque Mz[Nm]30303030
Pitch[µrad]± 11± 16± 19± 20
Yaw[µrad]± 11± 16± 19± 20
Weight with frame[kg]640
Bearing Air Bearing
Motor Ironless Dynamic Linear Motor
Feedback Linear Scale
Resolution Measuring system 0.05 µm (optionally up to 0.001 µm)
Material Anodized Aluminum, Granite
Optional features Frame
Variants clean room up to clean room class ISO 6 (higher on request)
Variants beam UV (DUV, EUV, X-ray, gamma on request)
Variants MagnetismMagnetic
Variants vacuum  on request

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Nadine Strudel
Consulting International

T +49 (0) 351 88585-44


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