Miniature Linear stages

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 2.3 µm, Load 9 kg, Speed 40 mm/s

Compact linear stage with internal motor

The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact positioning system.

  • Travels up to 80 mm in small installation spaces (130 x 130 x 43 mm)
  • Repeatability up to 2.3 µm
  • Easily stackable to compact multi-axis systems


  • Available with DC motor or stepper motor
  • 3-axis compact unit: MP130-3
  • Combinable with DT130 rotary stage
  • Stainless steel option for increased rigidity
  • Version for clean room, vacuum and EUV 

Fields of application

Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment


Modell MT130 -50-SM-80-SM
Repeatability unidirectional[µm]± 2.3± 2.3
Repeatability bidirectional[µm]± 4.3± 4.3
Accuracy[µm]± 8.1± 9.7
Flatness[µm]± 2.5± 4
Straightness[µm]± 1.8± 2.8
Positioning speed[mm/s]2020
Max. speed[mm/s]4040
Max. acceleration[m/s2]0.40.4
Max. load Fx[N]4545
Max. load Fy[N]9595
Max. load Fz[N]9595
Max. torque Mx[Nm]4.64.6
Max. torque My[Nm]1.81.8
Max. torque Mz[Nm]1.61.6
Pitch[µrad]± 70± 90
Yaw[µrad]± 40± 55
Motor Stepper MotorStepper Motor
Feedback Open LoopOpen Loop

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85

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Consulting, Project Management & Engineering

T +49 (0) 351 88585-67

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