XYZ Transfer Stage
Vacuum / Cleanroom Multi Axes Systems

782475:053.26, 782475:039.26, 782475:001.26
XYZ Transfer Stage - Vacuum / Cleanroom Multi Axes Systems

 

Fast 3-axis UHV system LA80-2LA95

UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load

This fast transfer stage is suitable for precise, fast and long-life applications in ultra-high vacuum. It also meets the requirements for use under extreme ultraviolet radiation due to its very low emission and low particle count. The axes are available in sizes LA80, LA95, LA170 and are designed for loads up to 20 kg in vertical operation. This axis combination was developed as part of the “tOMography Nano crYo (OMNY)” mit dem Paul Scherrer Institut (PSI).

Precise, fast and durable in ultra-high vacuum

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to10-8 / dryup to 10-11 mbar
  • Lifetime in kilometer range without liquid lubrication
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version

Optionen:

  • Travels specifically adaptable to your application up to 510 x 80 x 80 mm
  • Without feedback as pure stepper motor system up to 5 µm repeatability
  • Outstanding standstill in the nanometer range due to additional piezo pincer brakes in Z and Y
  • Ball screw in Z and Y for higher speed and longer life with lubrication
  • Versions for clean room ISO 14644-1 class 4 (up to class 1 on request)

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Transport systems in ultra-high vacuum, vacuum applications with dry lubrication, transfer systems, vacuum fine adjustment, EUV lithography, beam shaping for exposure processes, surface analysis, sensor positioning, mass spectrometry, coating processes, coating thickness and coating rate measurements, basic research, laboratory technology, analytics

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://pubs.aip.org/aip/rsi/article/89/4/043706/362160/OMNY-A-tOMography-Nano-crYo-stage

 

782475:001.26   X Y Z
Travel [mm] 510 40 80
  Repeatability unidirectional [µm] ± 0.4 ± 0.4 ± 0.4
  Repeatability bidirectional [µm] ± 0.5 ± 0.5 ± 0.5
  Positioning speed [mm/s] 50 4 4
  Max. load [N] 30 30 30
Feedback     Linear Scale   Linear Scale   Linear Scale
Motor     Stepper Motor   Stepper Motor   Stepper Motor
Guide   Cross roller stainless steel, hybrid
Length [mm] 706
Width [mm] 357
Height [mm] 260
Vacuum [mbar] up to 10-11  HV/UHV/EUV
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to  10-11
Max. bakeout temperature [deg] 120
Magnetism Versions   magnetic | low-magnetic | magnet-free

 

Used Standard Components

KGT 1412 / 1432

Flange single nut with 4-point-contact with internal ball return

Your customized system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10E-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Only selected materials, components, and lubricants meet the requirements for low outgassing. In many cases, the use of liquid lubricants is not possible. In addition, the bake-out process places significant stress on the positioning system; thermal stresses occurring at temperatures of up to 140 °C must be taken into account.
All components are designed to be vacuum-compatible and are specially cleaned after manufacturing. Assembly is carried out under cleanroom conditions. For non-magnetic systems, the choice of materials is even more severely restricted.

We offer a wide range of solutions for both UHV systems with the highest performance requirements and non-magnetic assemblies.

The customized adaptation of our positioning systems to existing chambers or setups is carried out in several structured steps. The goal is seamless integration with maximum precision, cleanroom and/or vacuum compatibility, and operational reliability.

Typically, the customization process includes:

  • Analysis of the installation situation (available space, interfaces, loads, degrees of freedom, environmental conditions)
  • Application-specific alignment with respect to vacuum, cleanroom, magnetism, or radiation requirements
  • Mechanical adaptations such as custom adapters, base plates, hole patterns, or installation heights
  • Adaptation of drive, measurement, and cabling concepts, including connector routing, feedthroughs, and cable management
  • Material and lubricant selection tailored to outgassing behavior, particle requirements, and bake-out conditions


The system design is carried out using 3D design and simulation, optionally complemented by prototypes, functional testing, and cleanroom or vacuum preparation.

Our positioning systems are designed for various cleanroom classes in accordance with ISO 14644-1 and can be adapted to the specific application. As standard, we implement systems for ISO 6 to ISO 4. For particularly demanding custom applications—depending on system concept, motion, materials, and lubrication—cleanroom classes down to ISO 2–1 are also possible.

The achievable cleanroom class depends, among other factors, on:

  • the selected mechanics and bearing concept
  • the drive and measurement systems used
  • materials, surface treatments, and lubricants
  • motion profiles and operating conditions, e.g., enclosure and extraction
  • multi-level cleaning processes, handling, and commissioning

All cleanroom systems are appropriately prepared, assembled, and final-cleaned in a cleanroom environment. Upon request, we develop custom solutions precisely tailored to the required cleanroom class and application.

Nearly all atmospheric standard axes are available anodized with UHV lubrication for residual pressures down to 10E-6 mbar — or even better. For systems with stepper or piezo motors, we offer the following vacuum preparation:

  • All parts vacuum-cleaned
  • Liquid lubrication with UHV oil for pressures down to 10-6 mbar
  • Maximum bake-out temperature 80 °C
  • Equipped with Phytron stepper motors
  • Stainless steel components (ball screw, guides, bearings, screws)
  • Kapton or PTFE cabling
  • Kapton or ceramic Sub-D connectors
  • Untreated aluminum surfaces
  • Bores and cavities with venting holes, vented screws, or slotted washers
  • No covers
  • Assembled in our cleanroom
  • Final cleaned
  • Delivered in evacuated, double plastic packaging

 

Click here for more systems:
Overview of our standard axes

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references