LA340-EDLM
Linear Stages
High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s
Highly dynamic linear stage with air bearing
The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.
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Fields of application
linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation
| LA340-EDLM | -500-EDLM-L | -1000-EDLM-L | -1500-EDLM-L | -2000-EDLM-L | |
| Travel | [mm] | 500 | 1000 | 1500 | 2000 |
| Repeatability unidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.3 | ± 0.3 |
| Repeatability bidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
| Accuracy | [μm] | ± 1.9 | ± 3 | ± 4.1 | ± 5.2 |
| Flatness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Straightness | [μm] | ± 0.8 | ± 1.5 | ± 2.3 | ± 3 |
| Positioning speed | [mm/s] | 790 | 1210 | 1630 | 2060 |
| Max. speed | [mm/s] | 1185 | 1815 | 2445 | 3090 |
| Max. acceleration | [m/s2] | 16 | 25 | 35 | 40 |
| Max. load Fx | [N] | 100 | 100 | 100 | 100 |
| Max. load Fy | [N] | 500 | 500 | 500 | 500 |
| Max. load Fz | [N] | 500 | 500 | 500 | 500 |
| Max. torque Mx | [Nm] | 30 | 30 | 30 | 30 |
| Max. torque My | [Nm] | 50 | 50 | 50 | 50 |
| Max. torque Mz | [Nm] | 30 | 30 | 30 | 30 |
| Pitch | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Yaw | [µrad] | ± 11 | ± 16 | ± 19 | ± 20 |
| Length | [mm] | 1060 | 1560 | 2060 | 2560 |
| Width | [mm] | 379 | 379 | 379 | 379 |
| Height | [mm] | 310 | 310 | 310 | 310 |
| Weight | [kg] | 370 | |||
| Weight with frame | [kg] | 640 | |||
| Bearing | Air Bearing | ||||
| Type of drive system | Linear Motor | ||||
| Motor | Ironless Dynamic Linear Motor | ||||
| Feedback | Linear Scale | ||||
| Measuring system resolutions | 0.05 µm (optionally up to 0.001 µm) | ||||
| Material | Anodized Aluminum, Granite | ||||
| Optional features | Frame | ||||
| Variants cleanroom | up to clean room class ISO 6 (higher on request) | ||||
| Variants beam | UV (DUV, EUV, X-ray, gamma on request) | ||||
| Variants magnetism | on request | ||||
| Variants vacuum | on request | ||||
FMC300
Installation module for dynamic applications and high loads and voltage.
FMC400/450
Multi-axis controller fully ready for tracking, simple creation of own programs.
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
ACS
We support integration of our systems into your ACS environment
Related Products
High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to 3090 mm/s
High performance stage (linear motor), travel 200 - 750 mm, rep ± 0.4 µm, load 6 kg, speed 1155 mm/s
High precision linear stage (linear motor), travel 50 - 260 mm, rep ± 0.3 µm, load 1,4 kg, speed 375 mm/s
High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s
High performance stage (linear motor), travel 250 - 750 mm, rep ± 0.4 µm, load 4.5 kg, speed 1500 mm/s
XY Aperture stage (linear motor), travel 385 x 385 mm, aperture 400 mm, rep 0.3 µm, load 23 kg, speed 500 mm/s
High performance XY stage (linear motor), travel 400 x 400 mm, rep ± 0.4 µm, load 100 kg, speed 1050 mm/s
Nearly all atmospheric standard rotary stages shown here are optionally available in a non-anodized version with UHV-compatible lubrication for residual pressures up to 10E-6 mbar. In this configuration, they achieve at least cleanroom class ISO 6 - or better - making them suitable for demanding environments.
For higher requirements, specially designed rotary stage variants are available, for example for cleanroom class ISO 2, vacuum up to 10E-11 mbar, or harsh radiation environments.
The vacuum rotary stages are specifically engineered for high axial and radial loads. Reinforced bearing concepts, adapted material selection, and vacuum-compatible lubrication and coating systems ensure stable rotation even under high payloads and large moments of inertia.
Overview Cleanroom & Vacuum Rotary Stages Contact Technical Consulting
Materials for Rotary Stages
Steinmeyer Mechatronik primarily uses aluminum for the structural components of rotary stages. This material provides an optimal balance of weight, stiffness, and thermal conductivity—critical for precise runout and repeatability.
Aluminum efficiently dissipates localized heat, for example from motor losses or bearing friction. As a result, the rotary stage quickly reaches a thermally stable condition—an essential prerequisite for consistent angular accuracy during continuous operation or high-dynamic motion.
The lower stiffness of aluminum compared to steel is compensated by design measures, such as:
- Reinforced housing and bearing structures
- Optimized wall thicknesses and installation heights
- Hollow profile constructions with high torsional stiffness
For special requirements—such as high load capacities, vacuum-compatible designs, or magnetically sensitive applications—steel or titanium versions are available as alternatives.
Functional Surfaces and Coatings for Rotary Stages
In addition to standard finishes, numerous customized surface and coating concepts are available. These are specifically designed to achieve very high cleanroom classes—up to ISO 1–2, depending on the application and process.
To meet demanding process requirements, we develop and qualify application-specific functional coatings, including:
- Nickel coatings
- PTFE & KEPLA® coatings
- Fluorinated lubricants
- Dicronite® / dry-film coatings
- Application-specific coating combinations
The following surface options are also available:
- Anodized (cleaned)
- Alternative anodized colors
- Aluminum bare, cleaned
- Bilatal
- Nickel
These surfaces are particularly suitable for:
- High cleanliness requirements in cleanroom environments
- Vacuum applications
- Chemically aggressive environments (e.g., life sciences)
- Optical systems with stray light requirements
Why Functional Coatings Are Critical for Rotary Stages (Before → After)
- Standard surface → EUV-compatible surface
- Reflective → Non-reflective, minimized stray light
- Standard sliding behavior → Optimized friction coefficients & reduced wear
- Basic protection → Enhanced chemical & corrosion resistance
- Standard configuration → Application-optimized performance
Special surface treatments are often required for UV / DUV / EUV applications (X-ray or gamma applications available upon request).
Yes. Our rotary stages can be modularly combined with linear, XY, or XYZ stages to form compact multi-axis systems (e.g., XYZ-R or Theta-Z). The required mechanical interfaces are already integrated into the design.
Typical Configurations
- XY + R → Compact rotation and positioning systems
- XYZ + R → 4DOF positioning
- Theta-Z → Combined rotational and vertical motion
- Parallel kinematic structures → For active alignment applications
Advantages of the Combination
- High system flexibility
- Modular expandability
- Space-saving integration
- Precise coordination of rotation and translation
Technical Requirements
- Matched mechanical interfaces (mounting pattern / centering)
- Rotary stage load capacity designed for additional axes (Fx, Fy, Fz)
- Consideration of moment of inertia and center of gravity
- Synchronized control of all axes
We are happy to advise you—quickly and without obligation:
For rotary stages, Steinmeyer offers standard motion controllers, PLC integration, as well as custom embedded solutions. Depending on torque requirements, dynamic performance, and installation constraints, the controller can be implemented externally in a control cabinet or fully integrated into the rotary stage module.
Overview Motion Controllers & Control Concepts
System Architecture – Optimized for Rotary Axes
Control solutions for rotary stages are selected application-specifically and precisely matched to the drive concept (e.g., torque direct drive or geared drive), angular measurement system, and environmental conditions. Particular focus is placed on runout accuracy, axis synchronization, and thermal stability.
Standard Motion Controllers
- For single rotary stages or rotational multi-axis systems (e.g., XYZ-R)
- Configurable control loops (position / speed / torque)
- High-resolution angular feedback
- Fieldbus interfaces (e.g., EtherCAT, PROFINET)
- Fast commissioning and fine-tuning
Typical application: Precision rotary stages with torque motor, direct drive, or gear-based rotation.
PLC Integration
- Integration into existing machine or system control architectures
- Centralized system logic via customer PLC
- Synchronization with linear axes or gantry systems
- Standardized industrial communication protocols
Typical application: OEM equipment, inspection systems, semiconductor tools, or assembly systems.
Custom Embedded Solutions
- Compact, application-optimized controllers for rotary stage modules
- Integrated power stages for torque or servo motors
- Reduced cabling effort
- Optimized for cleanroom, vacuum, or high-dynamic applications
Typical application: Highly integrated rotational systems with limited installation space or increased requirements for dynamics and precision.
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Katja Weißbach
Consulting
T +49 351 88585-64
E-Mail
Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail
Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail
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