MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5°
Compact Multi Axis Stages

782476:001.26

Surface aligner with stepper motor and ball screw

With this aligner, second translational movements of 15 mm in the plane and a rotation around the vertical of up to ± 5 degrees are realized. The motion R (Phi) results from the XY combination. The aligner is designed for loads up to 5 kg. The transmitted light aperture allows transfer measurement.

Outstanding precision in high vacuum

Ideal for transfer measurements in vacuum up to 10^-6 mbar

Designed for large samples with an aperture of 235 mm

High repeatability up to 1 µm with a load capacity of 5 kg

Ideal force transmission due to the use of the backlash-free ball screw 1214

Optimized price/performance ratio with precise operating parameters

Options:

Adaptation to the process: aperture, holder, feeder, sensor
Configuration for clean room ISO 14644-1 (up to class 1 on request)
Individual design with rack, vibration isolation, enclosure
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

HV / UHV wafer inspection, semiconductor inspection, semiconductor alignment, alignment of samples at high vacuum, analysis, incident and transmission light measurements, transfer measurements, assembly tasks, alignment of parts before joining

Specifications

782476:001.26		X	Y	Rz
Standard System		LA85	LA85	LA85
Travel	[mm; deg]	± 15	± 15	± 5
Repeatability unidirectional	[µm; deg]	± 0.8	± 0.8	± 0.8
Repeatability bidirectional	[µm; deg]	± 1	± 1	± 1
Positioning speed	[mm/s; deg/s]	1	1	1
Max. speed	[mm/s; deg/s]	2	2	2
Max. load	[N]	50	50	50
Motor		Stepper Motor	Stepper Motor	Stepper Motor
Drive		Ball Screw	Ball Screw	Ball Screw
Feedback		Open Loop	Open Loop	Open Loop
Aperture	[mm]	235
Length x width x height	[mm]	545 x 484 x 95