DT155-NM
Rotary Stages

High-resolution rotary stage (Piezo Motor), travel n x 360°, aperture ⌀ 78 mm, rep ± 0.0015 °, load 7 kg, speed 120 °/s
DT155-NM

 

Highly precise with dynamic imaging

  • Compact and outstanding flat (200 x 155 x 35 mm)
  • Repeatability up to ± 0.0015 °
  • Large aperture of 78 mm
Options:
  • Version for cleanroom, vacuum and beam
  • Combinable with the XY Aperture Stage KDT180-NM
  • Customized development with 3D design, prototypes, series production

Fields of application

High-precision and dynamic microscopy, e.g. electron microscope, ion microscope, scanning electron microscope, wafer handling, wafer inspection, semiconductor quality control, semiconductor research

 

DT155   -1NM-W -2NM-W -3NM-W -4NM-W
Number of Motors   One Motor Two Motors Three Motors Four Motors
Travel [deg] n x 360 n x 360 n x 360 n x 360
Repeatability unidirectional [deg] ± 0.0015 ± 0.0015 ± 0.0015 ± 0.0015
Repeatability bidirectional [deg] ± 0.0027 ± 0.0027 ± 0.0027 ± 0.0027
Accuracy [deg] ± 0.0039 ± 0.0039 ± 0.0039 ± 0.0039
Excentric runout  [µm] ± 5 ± 5 ± 5 ± 5
Wobble [µrad] ± 90 ± 90 ± 90 ± 90
Positioning speed [deg/s] 123 123 123 123
Max. speed [deg/s] 185 185 185 185
Max. acceleration [deg/s2] 2090 2090 2090 2090
Max. load Fz [N] 71 71 71 71
Max. torque Mx, My [N] 5.0 5.0 5.0 5.0
Max. torque Mz [N] 0.6 1.2 1.8 2.4
Length [mm] 200 200 200 200
Width [mm] 155 155 155 155
Height [mm] 35 35 35 35
Turntable Ø [mm] 150 150 150 150
Aperture Ø [mm] 78 78 78 78
Weight [kg] 0.8 1.6 2.4 3.0
Bearing   Thin-section Bearing
Motor   Nanomotion (Piezo)
Transmission   Friction, Ultrasonic
Feedback   Angular Scale
Surface Coating   Anodized Aluminum, Cleaned Aluminum
Optional Features  

Customer-specific adapters or bore grids,
combination with standard XY stages, linear axes or lifting stages
Versions for Cleanroom    Clean Room Class ISO 4 ((higher in request)
Versions for Radiation   EUV, DEV, UV (X-ray and gamma on request)
Versions with Lower Magnetism   low-magnetic (magnet-free on request)
Versions for Vacuum    10-8 mbar (higher in request)

 

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Your customized system

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

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