DT155-NM
Rotary Stages

High-resolution rotary stage (Piezo Motor), travel n x 360°, aperture ⌀ 78 mm, rep ± 0.0015 °, load 7 kg, speed 120 °/s

Highly precise with dynamic imaging

Compact and outstanding flat (200 x 155 x 35 mm)

Repeatability up to ± 0.0015 °

Large aperture of 78 mm

Options:

Version for cleanroom, vacuum and beam
Combinable with the XY Aperture Stage KDT180-NM
Customized development with 3D design, prototypes, series production

Fields of application

High-precision and dynamic microscopy, e.g. electron microscope, ion microscope, scanning electron microscope, wafer handling, wafer inspection, semiconductor quality control, semiconductor research

Specifications

DT155		-1NM-W	-2NM-W	-3NM-W	-4NM-W
Number of Motors		One Motor	Two Motors	Three Motors	Four Motors
Travel	[deg]	n x 360	n x 360	n x 360	n x 360
Repeatability unidirectional	[deg]	± 0.0015	± 0.0015	± 0.0015	± 0.0015
Repeatability bidirectional	[deg]	± 0.0027	± 0.0027	± 0.0027	± 0.0027
Accuracy	[deg]	± 0.0039	± 0.0039	± 0.0039	± 0.0039
Excentric runout	[µm]	± 5	± 5	± 5	± 5
Wobble	[µrad]	± 90	± 90	± 90	± 90
Positioning speed	[deg/s]	123	123	123	123
Max. speed	[deg/s]	185	185	185	185
Max. acceleration	[deg/s²]	2090	2090	2090	2090
Max. load Fz	[N]	71	71	71	71
Max. torque Mx, My	[N]	5.0	5.0	5.0	5.0
Max. torque Mz	[N]	0.6	1.2	1.8	2.4
Length	[mm]	200	200	200	200
Width	[mm]	155	155	155	155
Height	[mm]	35	35	35	35
Turntable Ø	[mm]	150	150	150	150
Aperture Ø	[mm]	78	78	78	78
Weight	[kg]	0.8	1.6	2.4	3.0
Bearing		Thin-section Bearing
Motor		Nanomotion (Piezo)
Transmission		Friction, Ultrasonic
Feedback		Angular Scale
Surface Coating		Anodized Aluminum, Cleaned Aluminum
Optional Features		Customer-specific adapters or bore grids, combination with standard XY stages, linear axes or lifting stages
Versions for Cleanroom		Clean Room Class ISO 4 ((higher in request)
Versions for Radiation		EUV, DEV, UV (X-ray and gamma on request)
Versions with Lower Magnetism		low-magnetic (magnet-free on request)
Versions for Vacuum		10^-8 mbar (higher in request)