KDT310-DC
XY Stages

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 0.5 µm, load 7 kg, speed 60 mm/s
KDT310-DC

 

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime.

Designed for microscopy tasks

  • Ideal for microscopy, optical inspection systems and laser processing
  • High-precision repeatability up to 0.5 µm
  • Good price-performance ratio and very long life cycle
  • Optional as stepper motor version or with 50 mm travel (KDT235) available
 

Fields of application

High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

 

Modell KDT310   -100-DC-R -100-DC-L
Travel [mm] 100 100
Repeatability unidirectional [μm] ± 1.5 ± 0.5
Repeatability bidirectional [μm] ± 2 ± 0.7
Accuracy [μm] ± 18 ± 6.1
Flatness [μm] ± 7 ± 7
Straightness [μm] ± 5 ± 5
Positioning speed [mm/s] 30 30
Max. speed [mm/s] 60 60
Max. acceleration [m/s2] 0.5 0.5
Max. load Fx [N] 45 45
Max. load Fy [N] 45 45
Max. load Fz [N] 70 70
Max. torque Mx [Nm] 6.1 6.1
Max. torque My [Nm] 6.1 6.1
Max. torque Mz [Nm] 5.6 5.6
Pitch [µrad] ± 150 ± 150
Yaw [µrad] ± 100 ± 100
Weight [kg] 13 13
Length [mm] 310 310
Width [mm] 310 310
Height [mm] 80 80
Aperture [mm] 150 150
Motor   DC-Motor DC-Motor
Feedback   Motor-Encoder Linearmesssystem, Linear Scale

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

Almost all atmospheric standard stages are unanodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

Overview Clean Room & Vacuum Stages    Get in touch with our technical consultant

Ja, Lineartische können auch als Hubtische (Z-Richtung) sowie gestapelt (XY-Bewegungen verwendet werden).

Wichtig dafür ist, dass die maximale Kraft in Antriebsrichtung nicht überschritten wird. Die Kraft für die vertikale Positionierung wird in der Spezifikation bei Linear Stages unter Fx angegeben.

 

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of the Linear Stages, because it efficiently dissipates local heat and quickly reaches a thermally stable state. This is a prerequisite for stable, precise systems. The lower stiffness of aluminum compared to steel is compensated by a slightly higher height of the stages or the use of hollow profiles. Note: An aluminum beam and a steel beam sag equally under their own weight!
In special cases, titanium is also used for magnet-free systems.

What surfaces are available?

Various surface options are available. Depending on the application, anodized and cleaned, alternative colors, aluminum cleaned and bare, bilatal or nickel are available for optimal process suitability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science). Special surfaces are often necessary for UV, DUV or EUV (X-ray, gamma on request).

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

  • Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
  • Electrodynamic linear motors (ironless or iron-core).
  • Piezomotors such as Piezo-Legs® or Nanomotion®.

Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Katja Weißbach
Consulting

T +49 351 88585-64
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
E-Mail

 

Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
E-Mail

 

Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
E-Mail

Our references